Development of One-piece XY Table with Two Step Magnifying Lever and Extremely Low Interference Ratio

本研究以精密定位工作台为研究对象，确定了机构设计的条件：1)独立运动：虽然工作台的运动在理论上与x、y方向无关，但由于制造误差而引入了两个轴之间的干涉运动；2)整体式结构：运动的重复性很高；3)位移放大杠杆：PZT驱动器的输出一般很小，因此需要机械杠杆来放大如此小的输出。实现了转台在200~300[μzm]左右的行程，并对转台的特性进行了理论分析、实验研究和有限元分析，并对结果进行了比较。主要结果是：y方向有限元/实验→的放大效率约为30%，z方向有限元/实验/理论→的理论驱动约为90%(y方向的干涉比驱动：2.3%(x方向)，4.7%(Z))z方向的驱动(8.2%(X)，9.7%(Y))

This research is much concerned with the stage for fine positioning.The conditions under which the design of the mechanism are determined as follows ;1)Independent motion : Although the motion of the table is theoretically independent of the direction of x and y, the interferential motions between both axes are brought in owing to the error of manufacturing.2)One-piece structure : High repeatability of motion is essential.3)Displacement magnifying lever : The output of PZT-actuator is in general very small, then, the mechanical lever for magnifying such a small output is necessary. By using it, around 200〜300 [μzm] travel of the table is realized.The characteristics of the table are studied theoretically, experimentally and by FEM and their results are compared with each others. Main results are : Magnification efficiency Actuation in y direction FEM/Experimental→around 30%, Theoretical 60% Actuation in z direction FEM/Experimental/Theoretical→around 90%(Dlnterferential ratio Actuation in y direction : 2.3% (in x direction), 4.7%(in z) Actuation in z directioni 8.2% (in x), 9.7%(in y)