Development of mechanical micro-fabrication system using pencil-shape electroformed tool

针对LIGA技术和微机电系统MEMS等传统工艺无法加工的三维微模具，开发了基于微磨削技术的机械微加工系统。在过去的两年中，进行了以下三个研究项目。(1)发展高速电铸技术，使电铸金刚石刀具具有优越的抗弯强度；(2)发展微修修技术，使电铸金刚石刀具加工成直径小于0.1 mm的铅笔形微磨刀具；(3)利用铅笔形微磨刀具和超精密加工中心加工2、3维微尺寸模具。所得结果总结如下：(1)镀镍/镀磷技术可以成功开发出与传统硬质合金刀具具有相同抗弯强度的电铸金刚石刀具。(2)利用金刚石网目尺寸为3000 ~ 8000的电铸金刚石刀具，可以开发出将微磨刀具的刀端加工成球形和楔形的微整修技术。(3)通过磨削试验验证了该微磨削工具可适用于微反射镜、微反应器、微棱镜阵列等二维和三维微结构的加工。

Development of mechanical microfabrication system using microgrinding was made for the purpose to fabricate 3-dimensional micro dies and molds that could not be fabricated by the conventional techniques, such as LIGA technology and Micro Electro mechanical System MEMS. During last 2 years, the following 3 research projects were conducted.(1)Development of high-speed electroforming technique that can produce electroformed diamond tool with superior bending strength,(2)Development of micro truing and dressing techniques that can fabricate electroformed diamond tool to pencil-shape microgrinding tool under 0.1 mm diameter,(3)Fabrication of 2 and 3 dimensional micro-sized dies and molds using pencil-shape microgrinding tool and ultraprecision machining center.The results obtained could be summarized as follows;(1)Nickel/phosphorous plating technique that can produce an electroformed diamond tool processing the same bending strength with the conventional, cemented carbide tool could be successfully developed.(2) Micro truing and dressing techniques that can fabricate the tool end of the microgrinding tool to spherical and wedge shape could be developed using electroformed diamond tool from #3000 to #8000 in diamond mesh size.(3)It was verified from the grinding test that the microgrinding tool could be adapted to the fabrication of 2 and 3 dimensional micro structures, such as micro-reflectors, micro-reactors and micro-prism arrays.