Vibration Isolation Systems Using Zero-Power Magnetic Suspension

(1)三轴主动隔振系统的设计与制造制造了零功率磁悬浮三轴主动隔振系统。它有一个圆形的隔离台和一个圆形的中间台。中间的桌子由底座上的三对弹簧和阻尼器悬挂。它们位于等边三角形的顶点上。隔离工作台由固定在中间工作台上的三个混合磁铁悬挂。每个混合磁体垂直对准一对弹簧和阻尼器。(2)三轴隔振系统性能实验研究采用数字控制器实现零功率控制。给出了系统在直接扰动作用下具有无穷大刚度的条件。设计与制造了六轴隔振系统，研制了零功率磁悬浮六轴主动隔振系统。为了控制隔振台在垂直方向的运动，安装了三个差动悬浮机构，每个机构由一个机械弹簧和一个混合磁悬浮机构组成。(4)六轴隔振系统性能的实验研究采用数字控制器实现零功率控制。(5)设计制造了由隔振单元组成的单元式隔振系统。(6)单元式隔振系统性能的实验研究在单元内采用数字控制器实现零功率控制。对其性能进行了实验研究。将这些单元组合在一起，实现了多轴隔振系统。

(1)Design and Manufacture of a Three-Axis Vibration Isolation SystemA three-axis active vibration isolation system using zero-power magnetic suspension was manufactured. It has a circular isolation table and a circular middle table. The middle table is suspended by three pairs of spring and damper from the base. They are located at the vertices of an equilateral triangle. The isolation table is suspended by three hybrid magnets fixed to the middle table. Each hybrid magnet is aligned with a pair of spring and damper vertically.(2)Experimental Study on the Performances of the Three-Axis Vibration Isolation SystemThe zero-power control was implemented with a digital controller. The condition for the system to have infinite stiffness for direct disturbance was derived. This characteristic was confirmed experimentally.(3)Design and Manufacture of a Six-Axis Vibration Isolation SystemA six-axis active vibration isolation system using zero-power magnetic suspension was manufactured. To control the motions of the isolation table in the vertical directions, three differential suspension mechanisms, each of which consists of a mechanical spring and a hybrid magnetic suspension mechanism, were installed.(4)Experimental Study on the Performances of the Six-Axis Vibration Isolation SystemThe zero-power control was implemented with a digital controller. The characteristics of the developed vibration isolation system were studied experimentally.(5)Design and Manufacture of a Unit-type Vibration Isolation SystemA vibration isolation system, which was composed of vibration isolation units, was developed.(6)Experimental Study on the Performances of the Unit-type Vibration Isolation SystemThe zero-power control was implemented with a digital controller in a unit. Its performances were studied experimentally. A multi-axis vibration isolation system was realized by combining the units.