Study and prototype fabrication of out of plane microactuator

1.目的为了研制新型薄膜金属玻璃的平面外微致动器，本研究主要从以下几个方面进行了研究。(1)新型离面微执行器的设计。(2)具有精密三维形状的离面微动器制作方法的检验。(3)考虑到光学拾取器的部署，制造微致动器的位移特性评估。结果基于金属玻璃薄膜的微加工和微成形技术，设计并制造了新型的面外微致动器（微透镜致动器）。MLA的测量性能如下所示。括号内的数字为规格。(1)行程：0.85 μm(1μm)(2)驱动对象：玻璃透镜，质量0.89 mg，直径1mm（质量0.89 mg，直径1mm）(3)倾斜误差：0.02°（小于0.8°）(4)共振频率：3.54 kHz（大于1khz）(5)抗震性：800G以上（无规格）(6)施加电压：50v（无规格）显然MLA除了行程外满足规格。未来的工作有必要对下一代高记录密度MO驱动系统的光拾取的商用MLA的生产率和制造工艺进行研究。此外，还旨在增加冲程和降低驱动电压。

1.PurposesIn order to make the new out of plane microactuator of thin film metallic glass, this research examined the following items.(1)Design of new out of plane microactuator.(2)Examination of fabrication method of the out of plane microactuator with precision 3D shape.(3)Displacement characteristics evaluation of the of the fabricated microactuator bearing the deployment to an optical pickup in mind.2.ResultsBased on microfabrication and microforming technology of thin film metallic glass, new out of plane microactuator (Micro Lens Actuator : MLA) is designed and fabricated. The measured performance of the MLA is as shown below. Figures in parentheses are specifications.(1)Stroke : 0.85 μm(1μm)(2)Driven object : Glass lens, Mass 0.89 mg, Diameter 1mm (Mass 0.89 mg, Diameter 1 mm)(3)Tilt error : 0.02° (less than 0.8°)(4)Resonance frequency : 3.54 kHz (more than 1 kHz)(5)Shock resistance : over 800G (no spec.)(6)Applied voltage : 50 V (no spec.)It becomes apparent that the MLA satisfies the specification except the stroke.3.Future worksIt is necessary to a conduct study of productivity and manufacturing process of commercial MLA for optical pickup of the next generation high record density MO drive system. Furthermore, an increase of a stroke and a decrease in drive voltage are aimed at.