Glovebox-integrated evaporation system

可穿戴在皮肤上的软传感器系统为持续和方便的健康监测提供了全新的可能性。例如，一种带有无线电链路的传感器“贴片”用于记录心电图（EKG）已在文献中得到证实。在进一步的步骤中，可以实现软传感器植入-也可能具有活性药物释放-这也为身体提供了全新的形状和功能可能性。光学测量方法目前在成像和生物医学分子诊断系统中以各种方式使用。为了能够将吸收测量技术或荧光测量技术等测量方法集成到新型软传感器系统中，除了无机半导体材料外，还需要新的材料类别和软基板上的单片集成新工艺。基于有机半导体材料的光电元件可以在大量的衬底上加工，并且可以使用有机化学原理定制光学特性。因此，有机发光二极管（oled）和有机光电探测器（opd）对于新型柔软、可弯曲和可拉伸的传感器系统非常有前途。在基尔大学集成系统和光子学主席，有机光电元件-有机发光二极管（oled）和有机光电探测器(OPDs) -用于柔性，柔韧，可拉伸和小型化传感器系统中的光学读出单元进行了研究。基于我们自己在小型化传感器系统和有机光电子学方面的广泛初步工作，本课题应用的手套盒集成蒸发系统将用于研究基于oled - opd的柔性可弯曲、可拉伸和软基板的光学测量系统。到目前为止，椅子上只有2009年的一种简单的涂层系统。它只在基板前面提供一个百叶窗，光源上方没有百叶窗，也没有自动的配方控制操作和掩模更换。这意味着如果不从系统中移除样本，则不可能发生任何参数变化。因此，获得一种新的高真空蒸发系统是研究成功的迫切需要。液相工艺步骤以及最终表征和封装应在氮气气氛中的手套箱中进行。为此，手套箱必须与蒸发系统集成。

Soft sensor systems that can be worn on the skin offer completely new possibilities for continuous and convenient health monitoring. For example, a sensor “patch” with radio link for recording an electrocardiogram (EKG) has been demonstrated in the literature. In a further step, soft sensor implants - possibly also with an active drug release - can be realized, which also offer completely new shape and functional possibilities in the body. Optical measurement methods are nowadays used in a variety of ways both in imaging and in biomedical molecular diagnostic systems. In order to be able to integrate measurement methods such as absorption measurement technology or fluorescence measurement technology into new types of soft sensor systems, new material classes in addition to inorganic semiconductor materials and new processes for monolithic integration on soft substrates are necessary. Optoelectronic components based on organic semiconductor materials can be processed on a large number of substrates and the optical properties can be tailored using the principles of organic chemistry. Organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) are therefore very promising for new types of soft, bendable and stretchable sensor systems.At the Chair for Integrated Systems and Photonics Kiel University, organic optoelectronic components - organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) - for optical read-out units in flexible, pliable, stretchable and miniaturized sensor systems are researched. Based on our own extensive preliminary work on miniaturized sensor systems and organic optoelectronics, the glovebox-integrated evaporation system applied for here is to be used to research OLED-OPD-based optical measurement systems for flexibly bendable, stretchable and soft substrates.So far only a simple coating system from 2009 is available at the Chair. This only offers a shutter in front of the substrate, no shutters above the sources and no automated recipe-controlled operation and mask change. This means that no parameter variations are possible without removing the samples from the system. The acquisition of a new high vacuum evaporation system is therefore urgently required for the success of the research. Liquid phase process steps as well as the final characterization and encapsulation should take place in a glovebox in a nitrogen atmosphere. For this, the glovebox must be integrated with the evaporation system.