Evaporation system with glovebox for metals and reactive materials

金属薄膜广泛应用于基础材料研究和光学传感器、太阳能电池和太赫兹天线等功能器件的制造。结构金属电极促进了二维半导体等功能纳米材料的研究。此外，高活性材料的薄膜被用于电池、太阳能电池和催化剂的能源研究。这种创新灵活的蒸发系统配有专用手套箱，可处理高达6英寸的晶圆基板，是锡根大学中央纳米制造设施的主要仪器之一。这个核心设施及其洁净室系统地为科学技术学院及其他学院的所有研究人员提供访问权限。北莱茵-威斯特伐利亚州与该大学正在将其整合到一个新的纳米科学中心，该中心拥有现代化的600平方米的ISO 4级洁净室。该战略是在dfg资助的微纳米分析核心设施MNaF的明确共享方法下，合并该大学的传感器系统中心、微纳米化学与工程中心和创新材料多学科中心的材料和器件开发纳米制造基础设施。该战略期望在最佳科学水平上可持续有效地使用该沉积工具和所有其他纳米技术仪器，配备专门的支持人员，对所涉及的过程进行专业优化，以及系统的用户访问组织/培训。该沉积工具与其他制造仪器以及纳米分析实验室的紧密联系，可以有效地开发对环境敏感甚至反应性材料（例如相变或能源材料）的高度专题研究。因此，从材料合成到最终设备应用或表征的整个工艺链将在低温和/或高真空条件下实现，并在各个仪器之间具有足够的传输机制。沉积工具配有一个电子束和两个热蒸发器，用于后续蒸发和共蒸发。它配备了一个等离子体源和气体入口，用于基材清洁，如果适用，可以钝化高活性薄膜，以及一个灵活的基材支架和加热。为了研究高活性材料，引入所需的蒸发源和基质以及处理所有空气，必须系统地排除。因此，该工具配备了专用的惰性气体手套箱，可以通过单独的门进入蒸发室（维护常规操作）。为了直接将反应性/敏感样品转移到其他制造或表征工具，沉积室进一步配备了真空负载锁。该装置的低温/真空转移梭与本包的其他仪器兼容。

Metallic thin films are manifold employed for fundamental materials research and to build functional devices like optical sensors, solar cells and THz antennas. Structured metallic electrodes facilitate the research on functional nanomaterials like 2D semiconductors. Moreover, thin films of highly reactive materials are utilized for our energy research on batteries, solar cells and catalysts.This innovative and flexible evaporation system with dedicated glovebox for processing up to 6” wafer substrates is one major instrument of the central nanofabrication facility at the University of Siegen. This core facility with its clean room systematically provides access to all researchers of the School of Science and Technology and beyond. The state of North Rhine-Westphalia together with the university is integrating this into a new nanoscience center with a modern 600m2 ISO 4 clean room. The strategy is to merge the university’s nanofabrication infrastructure for materials and device development at the Center for Sensor Systems, the Center for Micro- and Nanochemistry and Engineering and the Multidisciplinary Center for Innovative Materials under the clear sharing methodology of the DFG-funded Micro- and Nanoanalytics Core Facility MNaF. This strategy anticipates a sustainable and efficient use of this deposition tool and all other nanotechnological instruments, at the best scientific level, with specialized support personnel, a professional optimization of the involved processes, and a systematic user access organization/training. The close vicinity of the deposition tool to other fabrication instrumentation as well as to the nanoanalytical laboratories allows the efficient development of highly topical research on environmentally sensitive or even reactive materials, e.g., phase-change or energy materials. Therefore, the whole process chain from material’s synthesis to its final device application or characterization will be possible under cryogenic and/or high-vacuum conditions with adequate transport mechanisms between individual instruments.The deposition tool is equipped with one e-beam and two thermal evaporators for subsequent and co-evaporation. It comes with a plasma source with gas inlet for substrate cleaning and, if applicable, to passivate highly reactive thin films as well as a flexible substrate holder and heating. To enable the research on highly reactive materials, the introduction of the needed evaporation source and substrates as well as the handling of all, air has systematically to be excluded. Therefore, the tool is equipped with a dedicated inert-gas glovebox that allows to access the evaporation chamber through a separate door (routine operation maintained). To directly transfer reactive/sensitive samples to other fabrication or characterization tools, the deposition chamber is further equipped with a vacuum load lock. The cryo/vacuum transfer shuttle of this setup is compatible to the other instruments of this bundle.