Research and Development of Adhesive Bonding Device for Microfabrication

微尺寸结构的制造已经通过使用IC技术实现，例如光制造，并且已经在Si衬底上制造了精细齿轮和轴。虽然使用现有技术可以观察到尺寸约为10 μm至100 μm的结构，但尺寸在10 μm至100 μm范围内的结构被认为是难以操纵的;因此，该范围被称为“不可操纵”范围。因此，需要用于处理这些尺寸的结构的机械手。然而，如果使用这些操纵器来处理微尺寸结构，并通过将它们彼此配合来组装以形成微机构，则需要极小的尺寸公差，这是难以实现的。由于尺寸效应，我们提出了可以通过粘接剂连接来组装微尺寸结构，因此评估了使用粘接剂固定微尺寸结构的方法。2004年，研究了喷嘴的制造方法及其形状。通过各种实验，我们发现通过加热和快速拔出可以相对简单有效地制造玻璃细管。随后，研究了喷射喷嘴的内径对喷射的液滴尺寸的影响。当喷嘴内径从10 μm减小到2 μm时，所喷出的液滴尺寸减小。特别地，当内径为5 μm或更小时，液滴的尺寸显著减小，并且观察到直径为10 μm或更小的液滴。2005年，通过设计喷嘴形状，实现了直径约为1 μm的液滴喷射。最后，我们建立了一个胶粘剂排放装置的喷嘴的制造方法和有效的形状，这是必要的微尺寸结构的胶粘剂连接。

The fabrication of microsized structures has been realized by the use of IC technology, such as photofabrication, and fine gears and shafts have been fabricated on a Si substrate. Although structures with sizes of approximately 10 μm to 100 μm can be observed using the current technology, structures with sizes in the range from 10 μm to 100 μm are considered to be difficult to manipulate ; thus, this range is called the "unmanipulable" range. Therefore, manipulators for handling structures of these sizes are required. However, if microsized structures are handled using these manipulators and assembled by fitting them into each other to form a micromechanism, an extremely small dimensional tolerance is required, which is difficult to realize. We proposed that microsized structures can be assembled by adhesive bonding because of the scale effect, and hence evaluated a method for fixing microsized structures using an adhesive.In 2004, a fabrication method of discharge nozzles and their shapes were studied. From various experiments, we found that a glass thin tube can be fabricated relatively simply and effectively by heating and rapid withdrawal. Subsequently, the effect of the inner diameter of the discharge nozzle on the size of droplets discharged was studied. The size of droplets discharged decreased when the inner diameter of the discharge nozzle was reduced from 10 μm to 2 μm. In particular, when the inner diameter was 5 μm or less, the size of the droplet decreased markedly, and a droplet with a diameter of 10 μm or less was observed. In 2005, by devising the nozzle shape, the discharge of droplets with a diameter of approximately 1 μm was realized. In conclusion, we established the fabrication method and effective shape of the nozzle of an adhesive discharge device, which are essential for the adhesive bonding of microsized structures.