Ion Microscope for Nanostructuring and Mass Spectroscopy

一种优化的离子显微镜，用于与离子进行高分辨率成像，高分辨率和大面积样品结构，以及质谱学。该显微镜将理想地补充康斯坦茨大学核心设施中现有的设备，并在纳米结构和分析领域创造新的潜力。各种新的研究项目使得进一步提高纳米结构的分辨率成为必要。为此，需要一种时间上非常稳定的离子源，其图像分辨率小于2 nm。同时，我们需要高机械稳定性和样品的精确定位，以便能够以高分辨率绘制更大区域的图案。分析能力应该通过二次离子质谱仪(SIMS)提供样品的基本信息，这是我们目前还无法获得的。聚焦离子束(FIB)与SIMS的结合使元素分析具有最高的横向和深度分辨率。此外，SIMS具有所有优点，例如在ppm范围内的低检测下限、检测轻元素的能力和非常表面灵敏的测量。用最高分辨率的SIMS进行成像提供了许多新的可能性，例如用同位素进行标记。不同元素的离子源为纳米结构和质谱学带来了优势。它为低材料去除的高分辨率图形提供了轻元素的离子，但当需要加工更大的区域时，它也可以发射重离子。在质谱学的情况下，具有可用离子来提高正或负二次离子的电离效率是有利的。此外，簇源在材料和分子信息的消融过程中提供了减少的碎裂。

An ion microscope optimized for high-resolution imaging with ions, high-resolution and large-area structuring of samples, and mass spectroscopy is being applied for. This microscope will ideally complement the equipment already available in the Core Facilities of the University of Konstanz and create new potential in the field of nanostructuring and analytics. Various new research projects make it necessary to further increase the resolution of nanostructuring. To this end, a temporally very stable ion source with an image resolution of less than 2 nm is necessary. At the same time, we need high mechanical stability and precise positioning of the sample in order to be able to pattern larger areas with high resolution. The analytical capabilities should provide elementary information of the samples by a secondary ion mass spectrometer (SIMS), which is not accessible to us so far. The combination of a focused ion beam (FIB) with a SIMS allows elemental analysis with highest lateral and depth resolution. In addition, there are all the advantages of a SIMS such as a low detection limit in the ppm range, the ability to detect light elements and a very surface sensitive measurement. Imaging with a SIMS of highest resolution offers numerous new possibilities such as labeling by isotopes. An ion source with different elements brings advantages for both nano-structuring and mass spectroscopy. It provides ions of a light element for high-resolution patterning with low material removal, but can also emit heavy ions when larger areas need to be processed. In the case of mass spectroscopy, it is advantageous to have ions available that increase the ionization efficiency of positive or negative secondary ions. In addition, a cluster source provides reduced fragmentation during ablation of the material and molecular information.