Research of Fabrication and Application of functional micro-optical-element using soft X ray and deep ultra-violet lithography

随着光电系统的快速发展，微光器件作为激光源的输入输出元件有望得到广泛的应用。在政治电路中，需要具有政治光束的聚焦、分裂和延时功能。这些要求可以通过使用微菲涅耳带板元件来满足。本课题对设计和制造一种适用于OEIC的高效光栅型微光元件进行了试验研究，取得了以下成果：(1)微菲涅耳带片在聚焦特性设计上具有平面结构和灵活性的特殊优点。采用一个复合带板和两个带板，实现了延时单元。复合带板作为空间分束器。在300 ps的动态范围内，利用40 ps频宽的激光二极管，确定了光脉冲间隔与光纤端空间位移之间的比例关系。(2)非布拉格条件下透射光栅絮团布洛赫膨胀的实验结果与计算机模拟结果进行了比较。在不使用体全息图或发光全息图的情况下实现高衍射效率，为基于光刻技术的平面结构微光学光栅器件提供了前景。(3)试验设计和制作了一种适用于OEIC的高效空间分束器。提出了一种利用准布拉格条件，由斜入射圆柱透镜和平面线性带板阵列组成的新型空间分束器结构，以提高衍射效率。利用自制的空间分束器，演示了激光输出的同时聚焦和分束。(4)利用同步辐射光刻的深紫外区，成功制备了一个间距为1.25 um、燃烧角为45的光栅。该技术适用于光电系统中亚微米光栅器件的制作。少

With the rapid development of opto-electronic systems, micro-optic devices are expected to find wide applications as input output elements with laser source. In potical circuits the functions of focusing, splitting and time delay of potical beam are required. These requirements can be fulfilled by using micro-fresnel zone plate elements. This research project investigated a trial to design and fabrication an efficient grating type micro-optical element which is applicable to OEIC and we found the following results.(1) Micro fresnel zone plate has the special merit of its planar structure and flexibility in the desing of focusing characterisity. Using a composite zone plate and two zone plates, the delay unit was implemented. The composite zone plate acted as space-division beam splitter. The proportionality relationship between the optical pulse interval and spatial displacement of a fiber end was confirmed for a dynamic range of 300 ps, using a laser diode of 40 ps FWHM.(2) A comparis … More on between the experiment and the computer simulation based on the floque Bloch expansion of transmission grating at non-Bragg condition. Achievement of high diffraction efficiency without utilizing either volume hologram or blazed holigram favors the prospect of micro-optic grating components with planar structure based on lithographic technique.(3) A trial to design and fabricate an efficient spatially divided beam splitter which is applicable to OEIC. A new configuration of a spatially divided beam splitter is proposed, which is composed of a cylindorical lens and a planar linear zone plate array with oblique incidence, utilizing quasi-Bragg conditions, to improve high diffraction efficiency is expected. By using a fabricated spatially divided beam splitter, the simultaneous focusing and splitting of a laser output are demonstrated.(4) A 1.25 um pitch grating with a blazed angle of 45 is successfully fabricated using a deep UV region of synchrotron radition lithography. The present technoligy is suitable for fabricating submicron grating devices in opto-electronic systems. Less