Development of Fatigue Testing Method for Thin Films and Fine Wires and SEM In-Situ-Observation of Their Failure Process

本研究工作的主要目的是研制一种薄膜细丝疲劳试验装置。该电夹紧装置能使试样夹紧，防止试样夹紧部位发生故障。采用电-气伺服控制系统，在极轻的负载下实现精确的负载控制。可进行10-100mum厚度的薄膜和10-100mum直径的钢丝的疲劳试验。第二个目的是将疲劳试验机与扫描电子显微镜（SEM）相结合，以便在试验过程中对失效过程进行现场观察。第三是研究利用该系统研制的薄膜和细线的强度。成功地对直径为70 μ m的纯铜丝进行了拉伸试验和疲劳试验，并对断口进行了检查，探讨了断裂过程。对厚度为15 μ m的纯铝薄膜进行了试验，并利用扫描电镜对其破坏过程进行了现场观察。这些实验证明了所开发系统的有效性。

The primary purpose of this research work is to prepare a fatigue testing equipment for thin filma and fine wires. The electric chucking equipment enables ua to grip firmly the specimen and to prevent the failure at the chucking part of specimen. The electric-pneumatic servocontrolled system is applied to attain precise load control at the very light load. It can perform the fatigue tests of films with the thickness of 10-100mum and of wires with the diameter of 10-100mum. The secondary purpose is to combine the fatigue testing machine with a scanning electron microscope (SEM) in order to provide an in-situ observation of the failure process during the test. The third is to investigate the strength of thin films and thin wires using the system developed.Tensile test and fatigue test for pure copper wire with the diameter of 70 mu m are successfully conducted and the fracture surface is examined for discussing the failure process. The tests are also carried out for pure aluminum film with the thickness of 15 mu m and the failure process is observed in-situ by means of the SEM.These experiments prove the validity of the system dsveloped.