Integration of Fabrication Technology for Micromechatronics

该研究项目旨在集成微机械加工技术来制造微电子机械系统，这些系统由微结构、执行器、电子电路、传感器和光学器件组成。由于这些元件的加工技术各不相同，很难将它们全部应用到一个微系统中。我们选择了三个目标系统：(1)微型光学系统，(2)扫描探针显微镜，(3)毫米波天线扫描仪。针对微光学系统，设计了一种基于微驱动平台的光学准直器。舞台应具有三维(3-D)形状，以实现多自由度对齐。我们开发了一种自组装多晶硅薄膜三维微结构的新技术。表面微机械加工的薄膜，即平面微结构，在微驱动器…的力的作用下弹性变形为三维形状更多。变形通过焦耳加热的退火组织来固定。对于扫描探针显微镜，设计了一种使用微小振动探针的原子力显微镜，称为纳米悬臂梁。由于悬臂梁的小质量和相关的高振动频率，它有望具有特别高的灵敏度。悬臂梁的尖端被电化学蚀刻在一层电光片上。毫米波天线扫描仪由顶部带有天线的扭转台、带有静电驱动电极的三角形支承和毫米波振荡器组成。Anntena是使用薄膜技术制作的。工作台和支架分别由熔融石英衬底和硅衬底进行体微机械加工。振荡器是用化合物半导体技术制造的，最后将它们组装在一起。我们通过静电驱动确认了扫描器的运动，并确认了天线的毫米波发射。从而论证了不同微加工工艺组合使用的可行性。较少

The research project aims at the integration of micromachining technologies to fabricate micromechatronic systems ; these systems are composed of microstructures, actuators, electronic circuits, sensors and optical devices. Because the process technologies for these elements differ each other, it is difficult to apply them all together to built a mcirosystem.We have selected three target systems : (1) Micro optical systems, (2) scanning probe microscopes, and (3) Scanner for mili-wave anttena. Design, fabrication processes and testing of the systems were carried out.(1) As for micro optical systems, an optical aligner based on a microactuated stage was designed. The stage should have three dimensional (3-D) shapes to enable multi-degree-of-freedom alignment. We have developed a new technology to self-assemble 3-D microstructures made of polysilicon films. Surface micromachined thin films, i.e.flat microstructures, were elastically deformed into 3-D shapes by the force of microactuators … More . The deformation was fixed by annealing structures with Joule heating. No manual manipulation of structures was needed in the process.(2) As for scanning probe microscopes, an atomic force microscope (AFM) using a very small vibrational probe, called nano-cantilever, was designed. Due to the small mass of the cantilever and the associated high vibrational frequency, it is expected to have extra high sensitivity. The tip of the cantilever was electrochemically etched in a thin film of electrolite. We succeeded to apply the probe in the AFM.(3) The scanner for mili-wave antena was composed of a tortional stage with the antenna on top, a triangular support with electrostatic driving electrodes and a mili-wave oscillator. The anntena was patterned using thin-film technology. The stage and the support were bulk-micromachined from a fused-quartz substrate and a silicon substrate, respectively. The oscillator was made by the compound semiconductor technology, At the last process, all of them are assembled together. We confirmed the motion of scanner by electrostatic actuation and also the mili-wave emission from the antenna. Thus we demostrated the feasibility of the combined usage of different micromachining processes. Less