Functional Materials Processing by Electromagnetic Heating

本系列研究由日本大阪大学焊接研究所与澳大利亚卧龙岗大学材料工程系联合开展“电磁加热加工功能材料”的校级合作研究。1)采用电感耦合射频等离子体烧结法对碳化陶瓷TaC和HfC进行了烧结，获得了用于反应气体的新型高温电极。2)对氮化硅和氧化锆进行了毫米波（28GHz）烧结，并将烧结性能与常规热工艺烧结性能进行了比较。在这两种材料中，已经观察到样品的加速致密化，这导致致密化而没有明显的晶粒生长。3)研究了毫米波强场加热陶瓷的红外光谱测量，为样品温度的测量和介电性能的测量提供了可靠的方法。用离子束辅助沉积（Ti, Al） n研究了离子-固体相互作用，并用电子衍射研究了离子辐照对相形成和微观结构的影响。5)采用有限元方法研究了裂纹形成机理。6)举办两次大阪大学与卧龙岗大学联合座谈会，介绍和讨论合作研究成果；1996年3月在澳大利亚卧龙岗大学召开“微波与等离子体材料加工联合研讨会”，1997年2月在大阪大学召开“先进材料的微波、等离子体与热化学加工国际研讨会”。

A series of this investigation has been performed as "University-to-University Cooperative Research" between Joining and Welding Research Institute, Osaka University (Japan) and Department of Materials Engineering, University of Wollongong (Australia) for studies on "Functional Materials Processing by Electromagnetic Heating".1) Sintering of carbide ceramics TaC and HfC has been performed by inductively coupled rf plasma sintering method to obtain novel are electrodes for use in reactive gas at high temperature.2) Millimeter-wave (28GHz) sinteting of silicon nitride and zirconia has been carried out to compare the sintering performance with that obtained by conventional thermal process. In both materials, accelerated densification of the samples has been observed, which resulted in the densification without appreciable grain growth.3)Infrared spectroscopic measurements of the ceramics heated in the strong field of millimeter-wave radiation has been studied to develop a reliable method to measure the sample temperature as well as to measure dielectric properties.4) Ion-solid interaction has been studied by ion beam assisted deposition of (Ti, Al) N.The effect of ion irradiation on the phase formation and the microstructure has been investigated using electron diffraction.5) A finite-element-method has been developed to investigate the crack formation mechanism.6) Two joint symposia between Osaka University and University of Wollongong were held to present and discuss the results of the cooperative research ; "Joint Symposium on Microwave and Plasma Processing of Materials" held in the University of wollongong in March 1996 and "International Symposium on Microwave, Plasma and Thermochemical Processing of Advanced Materials" held in Osaka University ih February 1997.