Formation of Functionally Gradient cBN Films Using Ion Beam

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Boron nitride films were prepared by IBAD with N and/or Ar-mixtured ions. The c-BN films with improved tribological properties has been approached by inserting a B-rich buffer layr as a controlled buffer at the interface. Tribological characterization of the buffer layr indicated that the films with higher B/N transport ratio exhibited the simultaneous achievement of the highest adhesion strength tigether with the highest hardness value. The stoicheometric upper layr with high fraction of c-BN phase could be successfully grown on the B-rich layr formed on various substrates including highspeed-tool steel and WC.The insertion of the buffer layr exhibited the significant effect on the reduction of internal stress of the c-BN films and further on the enhancement of the tribological properties to obtain high hardness simultaneously with high adhesion strength. The double-layred BN films exhibited excellent characteristics in anti-corrosion capability, high-temperature phase stability and chemical innertness against various glass at elevated temperatures.