Development of Inline Apparatus for Measurement of Deformed Surface by means of Image Processor with Laser Beam

材料的自由表面质量随着塑性变形水平的变化而变化。长期以来，人们一直在研究材料的表面粗糙度随着应变的增加而增加。薄板冲压前和冷轧板电镀前产品表面粗糙度的控制是一个重要问题。因此，需要高精度地定量测量表面粗糙度。通常，用于测量表面粗糙度的方法是通过使用轮廓仪测量表面的轮廓和通过使用反射仪测量亮度。前一种方法在实际操作中难以测量二维表面粗糙度，后一种方法虽然可以无损地测量平均表面粗糙度，但不能准确地测量其值。因此，二维表面粗糙度不能在操作中以高精度测量， ...更多信息 这些方法。本文提出了一种用激光束测量表面粗糙度的新方法。如果具有高相干性的激光束投射在金属的粗糙表面上，则激光束被金属的表面结构衍射，并且观察到特征强度分布。通过对光束波的分布进行傅里叶变换，得到了所观察到的分布。由于金属的表面轮廓与束波的分布有关，因此强度分布包括表面轮廓的性质。因此，可以通过测量强度分布来检查表面轮廓。通过这种方法，可以在不接触材料的情况下非破坏性地测量表面粗糙度。由于该方法可用于实际操作，因此，该方法应用于产品表面的控制是值得期待的。本文介绍了一种新研制的表面质量在线检测装置。少

The free surface qualities of the material change accompanied with a plastic deformation level. It has been investigated for a long time that the surface roughness of the material increases with an increasing strain. The control of the surface roughness of product before pressing the thin plate and plating the cold rolled sheet is a serous problem. Therefore, it is necessary that the surface roughness is quantitatively measured with high accuracy. Generally, the methods for measurement of the surface roughness are to measure the profile of the surface by using the profile meter and to measure the brightness by using the reflection meter. In the former method, it is difficult to measure the two dimensional surface roughness in operation, and in the latter method, it is possible to measure the mean surface roughness nondestructively, but the values can not be measured with accuracy. Consequently, the two dimensional surface roughness can not be measured in operation with high accuracy by … More these methods. A new method for measurement of the surface roughness has been developed by means of a laser beam by the authors. If the laser beam with a high coherency is thrown on the rough surface of metals, the laser beam is diffracted by the surface structure of the metal and the characteristic intensity distribution is observed. The observed distribution is obtained by Fourier transform of the distribution of the beam wave. Since the surface profile of the metal is connected with the distribution of the beam wave, the intensity distribution includes the qualities of the surface profile. Therefore, the surface profile can be examined by measuring the intensity distribution. It is possible to measure the surface roughness nondestructively without touching the material by this method. Since this method can be used in operation, the application of this method to the control of the product surface expected. In this paper, a inline apparatus for measurement of surface quality is developed newly. Less