Development of ultimate optical detectors-thinned, back-illuminated, large CCDs.

该项目旨在开发制造下一代天文观测不可或缺的高量子效率、低噪声、大口径的终极光学成像仪的关键技术。例如，美国国家天文台在夏威夷莫纳克亚山建造的斯巴鲁望远镜，对其光学仪器使用的ccd设定了严格的规格，如下：4000 x 2000像素/片，15 x 15um像素，3面可触控配置，薄化和背光结构，具有高量子效率，应用抗反射涂层，低读取噪声，可在150K下操作，灵敏度均匀性高，缺陷最小。本课题取得的成果有：(1)通过对探测器表面积累处理的热、化学工艺的比较评价，建立了薄化背照ccd的基本工艺。就作者所知，在紫外光谱区域开发增透涂层以提高量子效率的专业知识是世界最高水平。积累经验并确定制造大尺寸三面可触控CCD的关键工艺建设高效CCD评估实验室，能够对制造的CCD进行快速可靠的评估由于我们成功地制造了具有显着高量子效率的小，薄，背光CCD和大尺寸，前置照明CCD，项目团队认为，制造最终光学ccd的基本问题已经得到解决。

The project was designed to develop key technologies to manufacture ultimate optical imager with high quantum efficiency, low noise, and large fromat, that is indispensable for next generation astronomical observations.The Subaru telescope under construction at Mauna Kea Hawaii, by National Astronomical Observatory, for instance, has set severe specifications for CCDs to be used for their optical instruments, as follows : 4000 x 2000 pixels/chip, 15 x 15 um pixel, 3-side buttable configuration, thinned and back illuminated structure for high quantum efficiency, spplication of anti-reflection coating, low read noise, operable at 150K,high uniformity of sensitivity, minimum defects, etc.The achievements made by the present research project are :(1) Establishing the fundamental processes to manufacture thinned and back-illuminated CCDs through comperative evaluation of the thermal and chemical processes for the surface accumulation treatments of the detector.Developing the expertise to deposite anti-reflection coatings to enhance the quantum effiency in the ultra-violet spectral region, that is the world highest level to the best of the authors knowledge.Gaining ixperience and identifying the key processes to manufacture a larege format, three-side buttable CCDsConstruction of an efficient CCD evaluation laboratory, that enables swift and reliable evaluation of manufactured CCDsSince we were successful in manufacturing small, thinned, baci-illuminated CCDs that show remarkablly high quantum efficiency and large format, front-illuminated CCDs, the project team belives that the fundamental problem for manufacturing the ultimate optical CCDs are cleared for solution.