SYNTHESIS OF BONE THEN FILMS BY LASER ABLATION AND THEIR APPLICATIONS TO IMPLANT MATERIALS

采用ArF准分子激光沉积技术制备了生物陶瓷羟基磷灰石（HAp）薄膜。实验对象为HAp（Ca/P = 2.03）粉末和P_2O_5粉末的混合粉末，用于控制HAp薄膜的Ca/P比。骨和牙齿也被用作目标。结晶的HAp膜是使用后退火方法或原位生长方法制备的。在前一种方法的情况下，薄膜在真空中在纯氧气体（压力0.4 mTorr）中在衬底温度100 ℃下沉积。薄膜在氧气+水蒸气流下在300 - 550 ℃下退火1 - 10小时。HAp薄膜生长在各种无机或有机衬底上，如Ti、Al_2O_3/Si（100）和SrTiO_3（100）无机衬底，聚酰亚胺（PI）和聚四氟乙烯（PTFE）有机衬底。用动态超显微硬度计和Instron试验机研究了HAp薄膜的力学性能。在Ti基体上制备的HAp薄膜的动态硬度为390。HAp膜对PI和PTFE的拉伸结合强度分别为9.8MPa和0.4MPa。HAp膜在Ti表面的抗压强度大于54MPa。在后一种方法中，HAp薄膜是在450 - 550 ℃的纯氧+水蒸气（压力100mTorr）中真空沉积的。在蓝宝石（0001）衬底上成功地形成了c轴取向的HAp薄膜。通过体外实验研究了HAp薄膜的生物相容性。本实验采用3T3-E1细胞作为成骨细胞贴壁模型。结果，细胞在Ti基底上附着并增殖。这一结果表明，激光烧蚀HAp薄膜可用于生物相容性植入物涂层材料。

The ArF excimer laser deposition technique has been used to fabricate bioceramic hydroxyapatite (HAp) thin films. the target was the pressed pellet, that was the mixture of HAp (Ca/P=2.03) powder and P_2O_5 powder for the control the Ca/P ratio of HAp films. The bone and tooth were also used as target. The crystallized HAp films were fabricated using a after annealing method or in-situ growth method. In the case of former method, the films were deposited in vacuum in pure oxygen gas (pressure 0.4 mTorr) at substrate temperature 100ﾟC.The films were annealed for 1-10 hr at 300-550ﾟC under the oxygen+water vapor flow. The HAp films have been grown on various inorganic or organic substrates, such as Ti, Al_2O_3/Si (100) and SrTiO_3 (100) inorganic materials, and polymides (PI) and polytetrafluoroethylene (PTFE) organic materials. The mechanical properties of HAp films were examined using a dynamic ultra-micro hardness tester and an Instron testing machine. The dynamic hardness was obtained to be 390 for HAp film on Ti substrate. Also, the tensile bond strengths of HAp film on PI and PTFE were 9.8MPa and 0.4MPa, respectively. and that of HAp film on Ti was more than 54MPa. In the case of latter method, the HAp films were deposited in vacuum in pure oxygen+water vapors (pressure 100mTorr) at temperature 450-550ﾟC.The formation of c-axis oriented HAp films has been accomplished on sapphire (0001) substrate The biocompatibility of HAp films were also studied by in-vitro experiments. In this experiment, 3T3-E1 cells were used for osteoblastic cells attachment models. As a results, the cells were attached and proliferated on the Ti substrate. This result indicate that the HAp films with laser ablation were useful for the biocompatible coating material of implant.