Research on thermally induced levitation mechanism using thermal creep flow

这项研究估计了由热蠕变流动引起的微悬浮力，热蠕变流动仅发生在克努森数定义为分子平均自由程与特征长度之比不可忽略的区域，在具有亚微米间距和温度梯度的两个平行板之间。采用考虑热蠕变流动效应的分子气膜润滑方程(MGL方程)和直接模拟蒙特卡罗(DSMC)技术，对热致悬浮机构中两平行平板间产生的气压进行了计算。长度为2 mm的无限宽板，其边界温度呈倒V形分布，中心温度tau&lt；wc&gt；(=T&lt；wcenter&gt；lt_0-1)为0.1，当两板之间的间距为0.1时，单位宽度的承载能力约为3mN。

This research estimates the micro levitation forces caused by thermal creep flow, which occurs only in regions where the Knudsen number defined as the ratio of the molecular mean free path and the characteristic length is not negligible, between two parallel plates with submicron spacings and temperature gradients. A molecular gas film lubrication equation (MGL equation) in cluding thermal creep flow effects, which is a Reynolds-type gas bearing equation for arbitrarily small spacings, and the Direct Simulation Monte Carlo (DSMC) technique are both utilized to calculate the air pressures generated between two parallel plates in the thermally induced levitation mechanism. An infinitely wide plate with a length of 2 mm, whose boundary temperature has an inverse-V-shaped distribution and the center temperature tau_<wc>(=T_<wcenter>lT_0-1) is 0.1, has a load-carrying capacity of about 3 mN for unit width when the spacing between the two plates is 0.1 mum.