Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

为了实现直径为10mm的先进管道内工作微机械，采用电流变液制作了一种简单的微流体控制系统，该系统的表观粘度可由外加电场强度控制。采用颗粒型ER流体的高级执行器：提出了一种简单的高级执行器METERA（可移动电极型ER执行器）。在可移动电极上施加电压，在可移动电极之间流动颗粒型ER流体，可移动电极被压差移动。制作了R-METERA（旋转式）和L-METERA（直线型），并对其特性进行了实验研究。采用均质ER流体的微型ER阀：提出了一种简单的采用均质ER流体的微型ER阀。微阀有一对平行的平板电极，均匀的电流变换器流体在它们之间流动。通过外加电场强度来控制压差和流量。采用常规加工和微加工两种方法制备了微型电磁阀，并对其特性进行了实验研究。采用谐振驱动的压电微泵：提出了一种高输出的压电微泵作为流体动力源。微泵利用由压电元件共振引起的波纹管的大体积变化和额外的质量。通过实验研究，验证了该方法的有效性。先进管道内工作微机械的结构：制作了一种由微电流变阀、谐振驱动的压电微泵和波纹管微执行器组成的微位置控制系统，并通过实验验证了该系统的有效性。同时，制作并测试了三自由度弯曲推进机构。

To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.