リアルタイム分子膜厚分布計測装置の開発

提出了一种基于相移技术的分子膜厚度实时测量系统。为了准确地观察分子膜，本系统需要满足以下条件：图像数据必须为非压缩数据。A-D转换不能包含在图像处理中。电噪声是不容忽视的。需要精确的传热控制。为了实现这一系统，研制了一种数字移相相机。它有三个数字电荷耦合器件（CCD）传感器和高精度偏振器。此外，为了获取高分辨率图像数据，还开发了一种新的数字记录器。该记录仪可以不经过压缩处理，以10位数据的形式记录图像，每秒可记录60张图像数据。将数码相机与记录仪系统相结合，实现了更精确的采集系统。结合移相技术和传统的椭偏原理，推导出移相椭偏原理。根据这一原理，研制了一种用于观察冷凝表面的试验装置。珀尔帖元件用于冷却以使表面凝结。并研制了peltier-热敏电阻控制器来控制该试验单元；因此，可以实现主动和准确的传热控制。用该测量系统观察了一个冷凝表面。

A real-time measurement system of molecular film thickness using a phase-shifting technique is proposed. In order to observe the molecular films accurately, the following conditions have been required in this system :1. An image data must be non-compression data.2. A-D conversion cannot be contained in the image processing.3. An electric noise cannot be ignored.4. An accurate heat transfer control is required.To realize this system, a digital phase-shifting camera has been developed. It has three digital Charge Coupled Device (CCD) sensors and high precision polarizer. Furthermore, a new digital recorder has been developed in order to take high-resolution image data. This recorder can take images as a 10 bit data without compression process, and can record 60 image data per a second. Combining both digital camera and recorder system, more accurate capturing system is accomplished.A principle of phase-shifting ellipsometry is derived using both phase-shifting technique and conventional principle of ellipsometry. A test cell for observation of condensed surface has been developed based on this principle. A Peltier element is used for cooling to make condensed surface. And peltier- thermistor controler is developed to operate this test cell ; as a result, active and accurate heat transfer control can be achieved. A condensed surface was observed using this measurement system.