Design and preparation of ferroelectric-metal nano-FGM multi-layer films

采用螺旋束溅射的方法，将所用的介质和金属分别设置为二氧化钛、二氧化硅和金粉，制备出复合薄膜。首先，基于功能梯度材料的设计，将二氧化钛-二氧化硅薄膜制备为介电介质薄膜。得到的薄膜具有窄带通滤波结构，只能穿透特定波长的光。其次，制备了介质和金属的薄膜。用螺旋等离子体溅射法制备了由电介质和金属化多层膜组成的量子点。通过制备多层结构的薄膜，根据薄膜的层叠数目，观察到特定波长的特殊吸收；通过制备多层薄膜，依次实现不同金属颗粒的层叠，有望实现新的非线性光学现象和非线性特性的发现等多重效果。

The dielectric and metal which were used were set to TiO_2, or SiO_2 and Au, respectively, and produced the compound thin film using the Helicon beam sputtering method.First, TiO_2-SiO_2 thin film was produced as a dielectric-dielectric film based on an functionally graded material design. The obtained thin film showed clearly that it has the narrow-band-pass filter structure which penetrates only the light of the specific wavelength.Next, the film of a dielectric and metal was produced. It was clealy that it is a film with each flat and smooth and uniform film.Quntum dot which consists of a dielectric and a metaled multilayer film was made by Helicon plasma sputtering method. Consequently, the grasp of conditions which can check a deposit of a golden fine crystal in a matrix SiO_2 was completed.By producing the film of multilayer structure, the peculiar absorption in specific wavelength was observed according to the number of laminating.Multi-effects, such as discovery of a new nonlinear-optics phenomenon and the nonlinear characteristic, are expectable by producing the multilayer film which carried out the laminating of the particle of different metal by turns.