X-ray Portrait High Resolution the Trial Production of Expansion Detection Equipment

将X射线撞击电子光学中的一个光电子形成的光电子像进行扩展，并用MCP或活动型半导体元件(叠层APS)分辨率进行探测和记录的空间旨在试制约50 nm的二维探测设备。首先，利用X射线靶可以观察到X射线激发的光电子像，尽管穿透电子线将扩展像的分解性能提高到荧光板上60 nm的同时提高到50倍。现状和问题1。采用15KV加速电压的电子线条图像的分解性能提高到40 nm。同样处于1状态的靶材的X射线激发拍摄的照片，分解性能会变差。但是，在硅藻土的摄影中，1μ附近的小孔已经分解。在使用SOR光的实验中，生物样品(HeLa细胞)在X射线的照射下以光计数的方式进行了光谱测量。10小时的长时间摄影也得到了稳定，并检查了不同波长图像内部结构的差异。图像的质量等同于最好的变焦烟斗，或者比它高一个等级。从硅藻土的图像推定其分解性能为0.30.4μm。提高样品正面的电场强度；检验了分解性能的改善。为了获得政策目标的高分解性能，大幅提高样品正面的电场强度，进行了像散的完美补偿，并有效地利用了层压APS。由于考虑到需要对图像进行滤波，因此研究了维也纳滤波器。

The space which expands the photoelectron image formed by X-rays hitting a photoelectron in electron optics, and is detected and recorded with MCP or an activity type semiconductor element (laminating APS) resolution aims at the trial production of the 2-dimensional detection equipment which is about 50nm.First, the photoelectron image by X ray excitation was observable using the X ray target, although the decomposition performance of the expansion image by the penetration electronic wire improved to 60nm on the fluorescence board to 50 times simultaneously.The present condition and a problem1. The decomposition performance of the electronic line image which used 15kV accelerating voltage improved to 40nm.2. A decomposition performance will become bad if a photograph is excited and taken by the X-rays from a target also in the state of 1. But, the small hole around 1μ has been decomposed in photography of diatomite.3. In the experiment which used SOR light, the bio sample (HeLa cell) has been hooted in photo counting mode by the irradiation of X-rays which carried out the spectrum. Prolonged photography of 10 hours was also stabilized and the difference in the internal structure of the image by wavelength has been Checked. The quality of an image was of the same grade as the best thing of a zooming pipe, or was a grade better than it. A decomposition performance is presumed to be 0.3 -0.4 μm from the image of diatomite.4. Improve the electronic field intensity of the front of a sample ; it has checked that a decomposition performance was improvable.In order to obtain the high decomposition performance of a policy objective, improve the electronic field intensity of the front of a sample sharply, astigmatic perfect compensation, and effective use of Laminating APS are performed. Since it is thought with it being prospective that filtering of an image is required, the Vienna filter is examined.