The invention of interstitial-type metal nitride thin films with opto-agilent function and their device fabrication

1.具有光致伸缩功能的间隙金属氮化物薄膜的发明(1)首次在常压下用卤化物气相生长的方法成功地制备出了具有光致伸缩功能的间隙金属氮化物薄膜。(2)首次阐明了缝隙金属氮化物薄膜具有光学伸缩功能。(3)通过控制氮气侵入量，发现间隙金属氮化物薄膜的光学伸缩功能表现出波长依赖性和光学各向异性。2.光学伸缩功能的研究(1)薄膜的折射率、折射率和光学各向异性间隙金属氮化物薄膜的反射率和禁带宽度是由氮气侵入量引起的薄膜内部局部结构的变化引起的。(2)ESR和SQUIED测量表明，光学Agilent函数的角度依赖于薄膜中未配对电子的磁各向异性。3.具有光学Agilent功能的间隙型金属氮化物薄膜的器件制作(1)成功地制作了光学开关和调制光等间隙型金属氮化物薄膜的器件。这些结果表明，具有光学Agilent功能的间隙型金属氮化物薄膜有可能在下一代中作为光学器件和电子器件的实际应用。

1.The invention of interstitial-type metal nitride thin films with opto-agilent function(1)Thin films of interstitial-type metal nitride were successfully prepared by original halide vapour phase growth under atmospheric pressure.(2)It was clarified, for the first time, that the thin films of interstitial-type metal nitride shows opto-agilent function.(3)By control of the nitric invasion quantity, it was found that the opto-agilent function of interstitial-type metal nitride thin films show the wavelength dependence and optical anisotropy.2.The investigation of opto-agilent function(1)The variation of refractivity, reflectivity and band-gap of interstitial-type metal nitride thin films originates from the change of the local structure in the film by the nitrogen invasion quantity. It was found the wavelength dependence of the function appears by these phenomena.(2)It was clarified by ESR and SQUIED measurement that the angle dependence of opto-agilent function derived from the magnetic anisotropy of unpaired electron in a film.3.The device fabrication of interstitial-type metal nitride thin film with opto-agilent function(1)The device fabrication of interstitial-type metal nitride thin films were successfully, such as optical switching and modulated light.From these results, the practical application as optics device and electron device in next generation may be possible using thin film of interstitial-type metal nitride with opto-agilent function.