Imaging of Spatial Distribution of Particles in Plasmas using Miniature Mass Spectrometers

1.高密度等离子体已经在一个圆柱形放电容器中产生，使用一个耐热玻璃观察口和一个环形槽微波发射器。采用极不对称双探针的探针诊断技术可以测量等离子体参数的空间分布和电子能量分布函数。经典的等离子体双极扩散发生在等离子体/玻璃界面附近的强电离区。微型质谱仪已被用于测量等离子体区的粒子密度。详细的测量表明，在等离子体/玻璃界面产生的离子通量可以定性地检测到，并且通量的方位角依赖性与界面上电离率分布的对称性有关。

1.High-density plasmas have been generated in a cylindrical discharge vessel using a Pyrex view port and a ring-slotted microwave launcher.2.The probe diagnostic technique employing an extremely asymmetric double probe allows the measurements of spatial distribution of plasma parameters and of electron energy distribution functions. The classical ambipolar diffusion of plasma takes place with an intense ionization region in the vicinity of plasma / glass interface.3.Miniature mass spectrometers have been utilized to measure particle densities in the plasma region. Elaborate measurements have shown that ion flux generated at the plasma / glass interface are qualitatively detected and that the azimuth angle dependence of the flux are correlated with the symmetry of the distribution of the ionization rate at the interface.