Evaluation of tribological properties of thin hard coatings by a slurry jet erosion test and its application to surface processing

为了快速评价薄硬涂层的摩擦学性能，我们提出了一种新型的固体颗粒冲蚀试验——浆液喷射法。在垂直于PVD薄涂层的高速冲击下，得到了含有1μm氧化铝颗粒的浆液射流。(1)在最高基体温度下沉积的TiN具有最高的耐磨性，尽管其硬度相对较低，但磨损率随TiN晶粒取向的变化而变化，即{111}取向的耐磨性高于{100}取向，这与各晶粒内部相应较高的抗解理断裂能力有关。(2)不同沉积条件下CrN的MSE耐磨性排序与其显微硬度与弹性模量之比（H/E）有良好的相关性。(3)对于TiN/TiCN涂层，TiN/TiCN涂层的TiN磨损率与单层TiN的磨损率一致。不同沉积体系的TiN/TiCN涂层均表现出不连续的磨损曲线，并以TiN、TiCN涂层及其界面为特征。涂层之间磨损性能的差异可能是由原始表面形貌引起的。(4)建立了一种新型的MSE试验装置（罐式试验），可以获得单位重量侵蚀物的磨损体积。因此，它产生了可重复的结果。(5)将各涂层的耐磨性排序与其他涂层评价试验（如微磨损试验）进行比较。因此，我们提出的微浆射流侵蚀（MSE）测试被证明是非常有用的筛选测试，当评估硬薄涂层的性能。此外，我们尝试用我们的MSE方法产生玻璃表面的纹理，并总结了加工的可能性。

We proposed slurry jet, a new type of solid particle erosion test, in order to quickly evaluate tribological properties of thin hard coatings. The slurry jet with 1μm alumina particles were impacted at high velocity perpendicular to thin PVD coatings.(1) The TiN deposited under the highest substrate temperature proved to have the highest wear resistance although it had a relatively low hardness, The wear rate varies with the TiN grain orientation, i.e. the {111} orientation shows higher wear resistance than the {100}, which correlates to a correspondingly higher cleavage fracture resistance within each grains.(2) The ranking of MSE wear resistance for CrN deposited by different conditions show good correlation to their ratio of micro hardness to elastic modulus (H/E).(3) For the TiN/TiCN coating, the wear rate of TiN of the TiN/TiCN coating coincided to that of the singlelayerd TiN. However, TiN/TiCN coatings by the different deposition system showed discontinuous wear curves which were characterized by TiN, TiCN coatings and their interface. The differences in the wear properties between the coatings may be caused by the original surface morphology.(4) We set up a new type of MSE test apparatus (pot type tests) which can obtain the wear volume per unit weight of erodent. As a result, it generates reproducible results.(5) The ranking of wear resistance among the various coatings was compared with those obtained by other coating evaluation tests such as micro abrasion test.As a result, our proposed micro slurry jet erosion (MSE) test proved to be very useful as a screening test when evaluating the properties of hard thin coatings. In addition, we tried to produce the surface textures of the glass surface by our MSE method and the possibility of processing was concluded.