Establishment of Evaluation Method of Nano and Micro-scale Surface Strength for Thin Coatings and its Application to Nano-scale Surface Processing

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High reliable evaluation techniques of the wear resistances and coating performances for thin coatings are strongly required in both scientific and industrial fields all over the world. In this study, our proposed micro slurry jet erosion(MSE) method as a new evaluation technique was investigated in the several subjects such as the performance of the MSE test equipment, discussions of the relation between MSE wear rates and coating properties as well as their wear mechanism and the application to surface micro fabrication. The test materials were TiN, TiAlN coatings, DLC film and single-crystal Si wafer.As a result, the high repeatable test results were obtained for various thin coatings. In addition, the relation between the wear rates and coating characteristics(crystal orientation, hardness and Young's modulus, hydrogen content in DLC film, etc.) and failure mechanism due to brittle fracture or impact fatigue became clear. Numerical-simulation analysis was also tried. Furthermore, the MSE method was assessed to have a high potential to micro and nano scale processing for Si wafer surface.