Establishment of Evaluation Method of Nano and Micro-scale Surface Strength for Thin Coatings and its Application to Nano-scale Surface Processing

薄涂层纳米、微米级表面强度评价方法的建立及其在纳米级表面加工中的应用

• 批准号: 21360073
• 负责人: IWAI Yoshiro
• 金额: $ 12.48万
• 依托单位: University of Fukui
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21360073/
• 关键词: マイクロスラリージェットエロージョン; MSE; 硬質皮膜; DLC表面モルフォロジー; 表面時系列観察法; スクリーニング試験法; 表面強度; 硬質薄膜; DLC; 表面モルフォロジー; 固体粒子衝突

High reliable evaluation techniques of the wear resistances and coating performances for thin coatings are strongly required in both scientific and industrial fields all over the world. In this study, our proposed micro slurry jet erosion(MSE) method as a new evaluation technique was investigated in the several subjects such as the performance of the MSE test equipment, discussions of the relation between MSE wear rates and coating properties as well as their wear mechanism and the application to surface micro fabrication. The test materials were TiN, TiAlN coatings, DLC film and single-crystal Si wafer.As a result, the high repeatable test results were obtained for various thin coatings. In addition, the relation between the wear rates and coating characteristics(crystal orientation, hardness and Young's modulus, hydrogen content in DLC film, etc.) and failure mechanism due to brittle fracture or impact fatigue became clear. Numerical-simulation analysis was also tried. Furthermore, the MSE method was assessed to have a high potential to micro and nano scale processing for Si wafer surface.

在世界范围内，科学和工业领域都迫切需要对薄涂层的耐磨性和涂层性能进行高可靠的评估。本文从MSE测试设备的性能、MSE磨损率与涂层性能的关系、磨损机理以及MSE在表面微加工中的应用等几个方面对我们提出的一种新型评价技术——微浆射流侵蚀（MSE）方法进行了研究。测试材料为TiN、TiAlN涂层、DLC薄膜和单晶硅片。结果表明，对各种薄涂层均获得了高重复性的测试结果。此外，磨损率与涂层特性（晶体取向、硬度和杨氏模量、DLC膜中氢含量等）以及脆性断裂或冲击疲劳失效机制之间的关系也变得清晰。并进行了数值模拟分析。此外，MSE方法在硅晶圆表面的微纳米尺度加工中具有很高的潜力。

项目成果

Tribological performance evaluation of (1 1 1) preferred oriented TiN duplex coatings

(1 1 1)优先取向TiN双相涂层的摩擦学性能评估

• DOI: 10.1016/j.wear.2009.04.007
• 发表时间: 2009
• 期刊: Wear
• 影响因子: 5
• 作者: J. Ishii;Y. Haruyama;S. Kawamura;N. Horikawa;Y. Iwai
• 通讯作者: Y. Iwai

The Wear Simulation of Thin Hard Coating in Micro-Slurry-Jet Erosion Test using Discrete Element Method

离散元法微浆料喷射冲蚀试验中薄硬涂层磨损模拟

• 发表时间: 2011
• 作者: Masayoshi Abo;Masaki Kobayashi;Masaru Higa;Satoshi Kakunai
• 通讯作者: Satoshi Kakunai

ウェットブラスト加工に関する基礎的研究(単結晶Siウェハの表面加工に及ぼす投射固体粒子径の影響)

湿式喷砂基础研究（投射固体颗粒尺寸对单晶硅片表面处理的影响）

• 发表时间: 2010
• 期刊: 日本機械学会論文集(C編)
• 作者: 董博宇;宮島敏郎;岩井善郎
• 通讯作者: 岩井善郎

ダイヤモンド状炭素膜の加熱による特性変化

类金刚石碳膜受热引起的特性变化

• 发表时间: 2011
• 作者: 橋本賢樹;神田一隆;石神龍哉;安田啓介;岩井善郎
• 通讯作者: 岩井善郎

Tribological properties of the (111) preferred oriented TiN film under some wearing conditions

(111)优先取向TiN薄膜在某些磨损条件下的摩擦学性能

• 发表时间: 2010
• 期刊: Proc. of 14th Nordic Symposium on Tribology(NORDTRIB2010)
• 作者: Y.Haruyama;S. Kawamura;J.Ishii;N.Horikawa;Y.Iwai
• 通讯作者: Y.Iwai