Development of processing tool using carbon nanotube

在这项研究中，我们提出了一种利用碳纳米管的多功能纳米加工工具，它由一个纳米管丝和一个纳米级喷嘴组成。该纳米工具使我们能够加工纳米级的材料。1.我们成功地将环状纳米管连接到光纤尖端和直径约500 nm的气体喷嘴上。为了研究纳米管的发光特性，在纳米工厂中安装了由制冷InGaAs二极管阵列和单色仪组成的光学测量系统。这使我们能够测量单个纳米管在近红外区域的发光。用InGaAs探测器和纳米管白炽灯成功地测量了光纤中-OH碱的吸收光谱，测得长度为1μm的纳米管从最高温度开始的导热系数为300W/m-K。Len…在纳米管长度小于1μm的条件下，热导率对Gth的依赖性更强，这归因于声子平均自由程受纳米管长度的限制。2.我们完成了纳米白炽灯的非接触原子力显微镜系统的构建。3.用传统的乙醇化学气相沉积系统对局域化学气相沉积催化剂进行了研究。最佳催化剂为Co/Mo混合物。利用由纳米管组成的场效应管对纳米管的电子性质进行了评价。为了验证引入气体的方法，将在室温下容易升华的W(CO)6引入到纳米管中，用电子束分解，在纳米管的末端沉积与W有关的化合物。测量了电子束诱导沉积法制备的小于10 0 nm纳米材料的质量。4.利用电子束诱导沉积法制备了非晶态碳膜，并在工作温度为10 0 0℃的纳米管白炽灯上进行了处理。较少

In this research, we have proposed a multifunctional nano-processing tool using carbon nanotubes, which consists of a nanotube filament with an nanoscale nozzle for gas supply. The nano-tool enables us to process the nanoscale materials.1.We have succeeded in nanotube attachment of the loop shape to not only an optical fiber tip but also the gas nozzle with a diameter of 〜500 nm. This device can be used as a nano heat source with gas supply.In order to investigate the light emission of the nanotube, an optical measurement system, which consisted of a cooled InGaAs diode array and a monochromator, was installed in the nanofactory. This enabled us to measure a luminescence in the near IR region from individual nanotubes. The absorption spectra of -OH base in the optical fiber have been successfully measured using the InGaAs detector and the nanotube incandescent lamp.Thermal conductivity for a nanotube with the length of 1 μm was measured to be 300 W/m-K from the maximum temperature. Len … More gth dependence of the thermal conductivity was found at the condition of the nanotube length less than 1 μm. This phenomenon is attributed to the phonon mean free path limited by the nanotube length.2.We have completed a construction of non-contact atomic force microscopy system for the nano-incandescent lamp.3.Catalysts for the localized CVD have been investigated by the conventional alcohol CVD system. The optimum catalyst was Co/Mo mixture. The electronic property of the nanotubes were evaluated by FETs consisting of the nanotube. In order to check the introducing method of gases to the chamber, W(CO)6, which is sublimated easily at room temperature, has been introduced into the chamber and decomposed by the electron beam to deposit a W related compounds on the nanotube's end. We have measured the mass of nano-materials with the size less than 100 nm deposited by an electron beam induced deposition method.4.An amorphous carbon deposit, which was synthesized by an electron beam induced deposition has been processed by the nanotube incandescent lamp with an operation temperature at 1000 ℃. Less