Secondary emission from iron and chemical components in indoor environment

本研究从实验上解释了室内环境中的一种二次发射现象，即化学成分的二次发射是由离子物质贡献的。首先，本文考察了再现含铁VOCs二次发射现象的实验方法，并研究了离子物质的测量方法。其次，对离子物质在电场作用下的行为进行了数值分析；在实验研究方面，以工业洁净室为例，测量了不同电场和电晕放电生铁条件下有机物在硅片上的附着力差异。以室内环境为例，在电场和生铁条件下对附着的VOCs进行了测量，结果表明大气中的离子物质对室内环境中VOCs的二次排放有一定的贡献，但其具体机理还有待于进一步的实验研究。此外，本文提出的电场和离子产生条件下的测量方法也是进一步研究的有效方法之一。

This study is carried out experimentally for the elucidation of a phenomenon about secondary emission in indoor environment, which is assumed that the secondary emission of chemical components is contributed by ionic substances.At first, experimental methods are examined to reappear the phenomenon of the secondary emission of VOCs with iron contribution and measuring methods of ionic substances are studied. Secondary, numerical analysis is taken to estimate the behavior of ionic substances on the condition of electric field.For the one of experimental studies, differences of the adhesion of organic substances on the Si wafer are measured on the various conditions of electric field and iron generation with corona discharge as the case of industrial cleanroom. As the case of indoor environment, adhered VOCs are also measured on the condition of electric field and iron generation.From the result, an atmospheric ionic substances inspected a possibility to contribute to secondary emission of VOCs in indoor environments but it is necessary to study further experiments and the detailed mechanism. Furthermore, the measuring method with the condition of the electric field and the ion generation, developed in this study, is one of effective methods for the further studies.