Development of an optical interference micro accelerometer with automatic tuning system

本研究旨在研制一种具有自动调谐功能的光学干涉式微加速度计。本课题的主要研究成果如下：1.自动调谐系统的研究。(1)对传感器灵敏度自动调谐的机理和逻辑进行了理论和实验研究。并制作了硬件和软件的原型系统，对其性能进行了测试。样机制造(1)样机利用MEMS技术制造了自动调谐系统。考察了调整和提高性能的效果。研究了光信号的多路复用(1)、多传感器测量系统的实现方法和光信号的多路传输，并制作了原型系统。(2)研究了其在井下、水中和地表下的性能。概述。(1)总结了设计方法学、MEMS工艺、软件、光学系统对未来工业生产的影响。(2)，该项目的主要成果被提交给相应的国际期刊。

This research was carried out to develop an optical interference micro accelerometer with automatic tuning system. Major results from this project are as follows :1. Investigation of the automatic tuning system.(1), Mechanism and logic to automatically tune the sensitivity of the sensor was theoretically and experimentally investigated. Prototype system with hardware and software was made to examine its performance.2. Fabrication of the prototype(1), A prototype the automatic tuning system was fabricated using the MEMS technologies. The effect of the tunig and improvement of the performance was examined.3. Investigation on the multiplexing(1), Methods for multisensor measurement system and multiplex transmission of the optical signal was investigated and prototype system was manufactured. (2), Its performance was investigated in borehole, water and subsurface4. Summary.(1), Design methodology, MEMS process, software, optical system was summarized for future industrial production. (2), The main results from this project were submitted to appropriate international journal.