Development and Evaluation of Multi-ferroic Actuator/Sensor Materials made by Rapid-solidification Process

指出了在智能/智能技术中，基于铁性材料之间的相互耦合效应设计先进的多功能执行器/传感器的多铁性方法的技术重要性。两种类型的多铁性致动器/传感器设备。提出了(1)磁驱动复合执行器和(2)基于MEMS的多功能声表面波传感器。首先，大规模稳健的复合材料驱动器是由形状记忆合金(TiNi)的超弹性纤维或片层在铁磁性金属(Ni)基体中增强的复合材料结构。这种多铁性复合材料可以通过施加无线磁场以高速和显著增强的应变来驱动。其次，介绍了基于声表面波(SAW)的多功能多铁基传感器件。在IDT之间的表面部分，通过磁控溅射形成了SMA、FSMA、磁致伸缩合金等环境活性材料薄膜。通过对声表面波幅值和相变信号的分析，可以无损地评价声表面波的各种环境传感参数，如温度、磁场强度、应力、加载滞后和内部损伤等。这些结果表明，基于多铁性效应的新型多功能复合驱动器和传感器具有很好的应用前景。

Technical importance of multi-ferroic approach for designing advanced multi-functional actuator/sensors based on a mutual coupling effect between ferroic material elements is pointed out for intelligent/smart technology. Two types of multi-ferroic actuator/sensor devices. i.e. (1) magnetically driven composite actuator and (2) multi-functional surface acoustic wave (SAW) sensor by MEMS are presented. First, a large-scale robust composite actuator is the composite structure which is reinforced by the superelastic fiber or lamellar of shape memory alloys (TiNi) in the ferromagnetic metal (Ni) matrix. This multi-ferroic composite can be driven with high speed as well as considerably enhanced strain by applying a wireless magnetic field. Secondarily, multi-functionally designed, multi-ferroic senor device using surface acoustic wave (SAW) is introduced. On the surface part between IDTs, environmentally active material films such as SMA, FSMA, magnetostrictive alloy etc. are formed by magnetron-sputtering. Various environmental sensing parameters i.e. temperature, magnetic field strength, stress, loading hysteresis and internal damage etc. can be evaluated nondestructively from the signal analysis of amplitude and phase change of SAW. Consequently, these results show the promising new types of multi-functional composite actuator and sensor based on multi-ferroic effect.