Development of ultra micro cascade wind tunnel and its application to aerodynamic performance design for components of MEMS turbomachinery

为建立MEMS叶轮机械叶栅气动热力学设计方法，阐明低雷诺数区可压缩叶栅间流场的力学行为，设计制作了MEMS叶轮机械叶栅。确定了MEMS涡轮叶栅的滞止压力损失系数、叶片马赫数和Zweifel参数。结果表明，MEMS透平叶栅的滞止压力损失系数比大型透平叶栅大几个数量级。因此，MEMS透平机械的气动热力设计必须付出巨大的代价。

MEMS turbine cascade was designed and fabricated, in order to establish the cascade aerothermodynamics design method for MEMS turbomachinery, and clarify the mechanical behavior of compressible cascade blade-to-blade flow field in low Reynolds number regime. Stagnation pressure loss coefficient, blade Mach number, and the Zweifel parameter for the MEMS turbine cascade were determined. It is concluded that the stagnation pressure loss coefficient of the MEMS turbine cascade is several order larger than that of large counterpart. Therefore, significant penalty must be paid for the aerothermodynamic design of the MEMS turbomachinery.