Synthesis of flat and large-area porous silicon films by photoetching and their application to devices

主要研究结果如下：(1)在Xe光照射下和在HF/KIO_3混合溶液中形成多孔硅时，观察到了较强的黄光发射。(2)在Xe光照射下，用HF/I_2混合溶液中合成的PSI层制备了注入型多孔硅发光二极管。(3)在不同波长的光照射下发生光氧化。(4)室温下，在HF/MnO_2混合溶液中形成的阳极PSI膜在绿光区有发光。(5)PSI层中存在基于量子限制效应和声子相关效应的两种不同的发射机制。(6)以硅片和石英玻璃为原料，在HF/KMnO_4混合溶液中合成了K_2SiF_6：Mn~(2+)&lt；4+~(2+)红色荧光粉。(7)以硅片为原料，在HF/K_2Cr2O_7混合溶液中合成了K_2SiF_6：Mn~(2+)&Gt~(2+)黄色荧光粉。(8)采用Ag_2CrO_4/Hf/H_2O腐蚀剂体系制备垂直排列的硅纳米线阵列。

The main results obtained in this study were :(1) Strong yellowish emission was observed when porous silicon (PSi) is formed under Xe light illumination and in the HF/KIO_3 mixed solution. (2) Injection-type light-emitting porous silicon diode was obtained by using PSi layer synthesized in an HF/I_2 mixed solution under Xe light illumination. (3) The photo-oxidation occurs under light illumination at various wavelengths. (4) The anodic PSi layers formed in HF/MnO_2 mixed solution showed light emission in the green spectral region at room temperature. (5) There are two different emission mechanisms in the PSi layers that are based on the quantum-confinement effect and the phonon-related effect. (6) K_2SiF_6:Mn^<4+> red phosphors were synthesized from Si wafer and silica glasses in HF/KMnO_4 mixed solutions. (7) K_2SiF_6:Mn^<2+> yellow phosphor was synthesized from Si wafer in HF/K_2Cr_2O_7 mixed solution. (8) A Ag_2CrO_4/HF/H_2O etchant system was developed for fabricating vertically well-aligned Si nanowire arrays.