Development of laser-machinable glass by electric-field assisted ion-exchange

为了提高硼硅玻璃的激光可加工性，采用电场辅助固态离子交换法将铜和银离子掺杂到硼硅玻璃表面。结果发现，掺杂铜和掺杂银的玻璃在紫外范围内具有不同的光学特性和激光加工性能。Nd:YAG纳秒激光对含铜区和含银区的三、四次谐波产生（THG/FHG）由于其高的光吸收而产生平坦、光滑和无缺陷的空穴。然后进行了铜和银在玻璃上的序贯掺杂。虽然预期会形成分离的两层，即含铜区和含银区，但EPMA结果表明，表面修饰层同时含有铜和银。

In order to improve the laser-machinability of borosilicate glass, copper and silver ions were doped to the borosilicate glass surface by electric field-assisted solid-state ion-exchange method. As a result, it was found that copper-doped and silver-doped glasses had different optical characteristics and laser-machinabilities in UV range. Third and fourth harmonic generation (THG/FHG) of Nd:YAG nanosecond laser irradiations to copper-containing region and FHG to silver-containing region produced flat, smooth and defect-free holes because of their high optical absorptions. Then the sequential doping of copper and silver to glass was carried out. Although the formation of separated two layers, that is, copper-containing and silver-containing regions, was expected, the EPMA results showed that the surface modified layer contained both of copper and silver.