Study on highly efficient laser-plasma light source and its applications for microfabrication and textural control of materials

利用时间分辨极紫外相机观测了同轴双脉冲和逆流双脉冲同时辐照微球锂靶的等离子体膨胀。逆流脉冲被证实是更有效的均匀加热的目标。在5-17 nm波长范围内，低温氙旋转靶的软X射线转换效率最高可达25%/2 π sr。碎片溅射的衰减系数和氩气对13.5 nm软X射线的吸收系数分别为2.2 × 10 ^m^2和1.8 × 10 ^m^2。<20><-22>溅射衰减系数与有效碰撞截面等效。这些参数提供了一个有用的设计工具，实现一个实用的软X射线源。

Plasma expansions on micro-balloon lithium targets irradiated with coaxial double pulses and counter-streamed simultaneous two-pulses were observed by a time-resolved EUV camera. The counter-streamed pulses were confirmed to be more effective for uniform heating of the target. A soft X-ray conversion efficiency in a wavelength range of 5-17 nm in a cryogenic xenon rotating target was 25%/2πsr at the maximum. An attenuation coefficient of sputtering by the debris and an absorption coefficient of soft x-rays at 13.5 nm by argon gas were derived to be 2.2×10^<20> m^2 and 1.8×10^<-22> m^2, respectively. The attenuation coefficient of sputtering is concluded to be equivalent to the effective collision cross section. These parameters provide a useful design tool for realizing a practical soft x-ray source.