Self-assembly of fine particles using combination of dispenser and stage control

细颗粒的自组装是纳米/微结构的潜在过程之一。它既可以用作刻蚀掩模，也可以用作功能器件，因此具有多功能性。然而，传统的浸渍镀膜法在基材尺寸和颗粒尺寸上都存在局限性。这项研究提出了一种新的工艺，它利用分配器和机动工作台相结合。通过对分配器和工作台的控制，在不需要掩模的情况下，将各种颗粒以任意图案组装在基片上。然后，讨论了颗粒的固定，其中颗粒使用UV固化树脂转移到另一基材上。在这个过程中，结构变得颠倒，顶部的粒子在相同的高度排列。并对其在抛光工具上的应用进行了探讨。

Self-assembly of fine particles is one of the potential processes for nano-/microstructuring. It has versatility because it can be used as etching mask as well as functional devices. However, traditional dip-coating has limitation of both of substrate size and particle size. This study proposes a new process which utilizes a combination of dispenser and motored stage. Applying control of dispenser and stage, various particles were assembled on a substrate along arbitrary pattern without any mask. Then, fixation of the particles was discussed where the particles were transferred to another substrate using UV curing resin. In this process, the structure becomes upside-down and the top particles aligned at same height. Thus, an application to polishing tool was also discussed.