Development of removal technique of diamond films for reuse of WC-Co alloy tools

金刚石涂层WC-Co合金刀具用于碳纤维增强塑料的钻削加工。为了实现刀具的再利用，有必要建立一种去除涂层磨损的金刚石膜的技术。然后，开发了一种利用高密度大气等离子体炬系统去除膜层的技术。该系统能在2.54 GHz微波下稳定输出1.2kW的功率，连续输出1h以上。实验证明，通过向Ar等离子体中添加氧气气体，该系统可以有效地去除膜层。研究发现，通过控制等离子体条件，该技术还可以应用于去除多晶金刚石薄膜，而不需要选择性地刻蚀晶界和/或晶向关系。

Diamond coated WC-Co alloy tools are used for the drilling of carbon fiber reinforced plastics. To realize the reuse of the tool, it is necessary to establish a technique to remove worn diamond film coated. Then, a technique with high density atmospheric plasma torch system is developed to remove the film. The system can produce output power of 1.2 kW stably for more than 1 hours continuously under 2.54 GHz microwave. It is proved that the system can remove the film efficiently by the addition of oxygen gas to Ar plasma. It was found that the technique can also be applied, by controlling plasma conditions, to the removing of polycrystalline diamond film without selective etching of crystal boundaries and/or crystal orientation dependence.