Development of Microreactors with Nano Structures by ApplyingInternal Oxidation of Alloys

研究了一种利用稀镍（铝）合金内氧化制备纳米棒阵列结构的微反应器的新方法。为了优化纳米棒阵列结构的内氧化工艺，将传统的块体合金内氧化模型与固溶体中Al的形貌相结合，建立了纳米棒阵列结构内氧化动力学模型。通过模型计算与实验结果的对比，验证了数学模型的有效性。通过渗铝和内氧化的方法可以在通道壁上均匀地制备纳米棒阵列。纳米棒的尺寸范围为200-300 nm，即使在较高的温度下进行内氧化过程。讨论了在纳米棒阵列结构上添加光催化剂的常压CVD有机金属氧化物工艺。采用化学气相沉积法在纳米棒的顶端成功地沉积了具有光催化活性的TiO_2。通过对甲烷蓝溶液的脱色来评价其光催化性能。在相同的CVD工艺条件下，光催化TiO 2纳米棒阵列比在Ni基体上涂覆TiO 2纳米棒阵列具有更快的脱色效果。纳米棒阵列中的空间对于溶液中的扩散和UV光的吸收很可能是有效的。制作了微反应器样机，在通道壁上布置了纳米棒阵列。证实了微反应器的光催化反应。

New approach for fabricating microreactors with naro-structure on the channel wall is studied with a production technique of nano-rod array structure via internal oxidation of dilute Ni(Al) alloys. In order to optimize internal oxidation process for nano-rod array structure, a kinetic model is established by combining a traditional internal oxidation model of bulk alloys and Al profile in solid solution. Validity of the mathematical model was confirmed by comparing the model calculation and experimental results. Nano-rod array can be fabricated homogenously on the wall of the channel by aluminizing and internally oxidizing. Size of nano-rods was ranged from 200-300 nm even at higher temperatures for internal oxidation process. Atmospheric CVD process of organometallic oxides was discussed for addition of photocatalyst on the nano-rod array structure. Photocatalytic TiO_2 can successfully deposited on the tips of nano-rods by the CVD process. Photocatatic performance was evaluated by decolorization of methane blue solution. Nanor-rod array with photocvatalytic TiO2 has faster decolorization than Ni substrate coated with TiO2 by the same CVD process. Space in nano-rod array is l\most likely effective for diffusion in the solution and absorption of UV light. Prototype microreactor was produced with nano-rod array on the channel wall. Photocatalytic reaction of the microreactor was confirmed.