Fabrication of oxide nanostructures using electron beaminduced deposition and their physical properties

电子束诱导沉积(EBid)是制备具有高度柔性形状的位置可控纳米结构的最有前途的技术之一。在这个过程中，有机金属化合物气体或蒸汽被电子束分解，分解气体中的不挥发部分被沉积在衬底上。本研究利用eBid法制备了氧化物和金纳米结构，并研究了其在氧化钼纳米结构上的光导性能。

Electron beam induced deposition (EBID) is one of the promising techniques to produce position-controlled nanometer-sized structures with high flexibility in their shape. In this process, an organometallic compound gas or vapor is decomposed by electron beam and the non-volatile part of the decomposed gas is deposited on substrates. In this research, oxide and gold nanostructures were fabricated using EBID and the photoconductive properties were studied on molybdenum oxide nanostructures.