Development of micro actuation systems using ac electroosmotic flows

交流电渗透(ACEO)通过简单的固定电极向液体施加相对较低的交流电压，从而产生对流的水。通过从ACEs对流中获得单向流动，将实现先进的微驱动系统。为实现上述功能，本研究提出并研制了三种导流板微泵、方形极缝电极微泵和小管板电极微泵。在有限元模拟的基础上，从理论上对微泵的性能进行了评价。在此基础上，开发了MEMS工艺，制作了微泵。通过实验，明确了微泵的特性，验证了微泵的有效性。

The ac electroosmosis (ACEO) produces convection flows of water by applying relatively low ac voltage to the liquid through simple fixed electrodes. By obtaining a unidirectional flow from the ACEO convection flow, advanced micro actuation systems will be realized. In this study, to realize above-mentioned function, three micropumps using flow deflectors, square pole-slit electrodes, and plate-small pipe electrodes were proposed and developed. Based on the FEM simulation, the performances of micropumps were theoretically evaluated. Then the MEMS processes were developed and the micropumps were fabricated. Through experiments, the characteristics of micropumps were clarified and their validity was confirmed.