Integrated spectrum sensor for measurement of microscopic light emission

提出了一种用于分光光度分析的新型传感器原理。在集成电路的互连层中实现了语音滤波器，在硅片上形成了有源像素传感器（APS）。通过对具有不同光谱响应特性的传感器像素输出数据进行处理，估计出可见光或近红外光谱。该器件采用时域有限差分法仿真设计，并采用CMOS 180nm工艺进行了样机制作。成功地观察到每个APS的特征光谱响应。该传感器装置适用于高速热视觉系统和微发射或吸收光谱分析。

Novel sensor principle is proposed for a spectrophotometric analysis. The phonic filters are implemented in the interconnect layers of the integrated circuit and the active pixel sensors (APS) are formed on the Si chip. The visible or near-infrared spectrum is estimated by data processing with the output from the sensor pixels which have the different spectral-response characteristic. The device is designed by using FDTD simulation and prototyped with CMOS 180nm process. The characteristic spectralresponse for each APS is successfully observed. The prosed sensor device is applicable to the high-speed thermo-vision system, and micro-emission or absorption spectrometry.