Development of high precision correction system of sensor anglesin three dimensional hall probe

三维霍尔探头中角霍尔传感器的x、y、z轴方向不正确，造成了场测量误差。研制了霍尔探头传感器角度自动测量系统。该系统由三轴亥姆霍兹线圈和五轴定位台组成。线圈内部的定位台部件采用非磁性材料，避免了磁场畸变。一个拾取线圈连接在定位系统上，亥姆霍兹线圈的场方向根据舞台的机械轴进行测量。

Angles hall sensors in a three dimensional hall probe are not directed along the x, y and z axes correctly, and it causes an error of field measurement.Automated measurement system for the sensor angles of hall probe is developed. The system consists of 3-axis Helmholtz coils and 5 axis positioning stage. The parts of positioning stage inside the coils are made of non-magnetic materials in order to avoid field distortion. A pickup coil is attached to the positioning system, and the field direction of the Helmholtz coil is measured against the mechanical axis of the stage.