High sensitive probe for magnetic resonance force microscopy

利用磁共振力显微镜（MRFM）研究了硅纳米线悬臂式传感器的双稳态特性。在悬臂梁中间的镜面部分设计了干涉仪，用于测量纳米线悬臂梁的挠度。单个3.5微米的NdFeB颗粒安装在悬臂的顶端。这种双稳定的聚合物叫做PVBPT，它可以在氧化后保持薄膜内部的自由基。利用MRFM系统对PVBPT样品进行测量，并通过在XYZ方向上扫描样品来检测磁共振力信号。本研究的结论提高了利用高灵敏度硅纳米线探针成像薄膜中自由基或硅表面缺陷的潜力。

Nanowire cantilever sensors made of Si with a magnetic particle on the tip were fabricated for the study of bi-stable polymer material properties using magnetic resonance force microscopy (MRFM). The mirror part at the middle of cantilever was designed for interferometer to measure the deflection of the nanowire cantilever. Single NdFeB particle of 3.5 micron is mounted on the apex of the cantilever. The bi-stable polymer called PVBPT, which can hold radicals inside of the film after oxidation was used. The PVBPT sample was measured using the MRFM system, and the magnetic resonance force signals were detected by scanning the sample in XYZ directions. As the conclusion of this research, the potential of imaging the radicals in film or the defects on the surface of silicon by using high sensitive silicon nanowire probes is improved.