High Resolution Surface Zone Analysis and Ion Beam Processing (M04)

在过去的研究期间，我们利用了一系列高分辨率表面技术来量化新开发的用于光学元件生产的模具涂层的机械和化学性质。我们发现，离子辐照是将杂化溶胶-凝胶薄膜转化为最终硬化态的有效手段。下一个研究阶段将集中于高分辨率表面区技术的使用，以帮助开发基于离子辐照溶胶-凝胶膜的新型先进模具涂层，并使模具表面和光学部件的近表面机械和化学表征成为可能。

Over the past research period, we have utilized a range of high resolution surface techniques to quantify the mechanical and chemical nature of newly developed mold coatings for use in optical component production. We have found that ion irradiation is an effective means to convert hybrid sol-gel films to their final hardened state. The next research period will be focused on the use of high resolution surface zone techniques to aid in the development of new advanced mold coatings based on ion irradiated sol-gel films, and to enable the near surface mechanical and chemical characterization of both mold surfaces and optical components.