Practical operational use of higher order polynomials in reducing the linearity errors of nanopositioning stages

Prior Science正在寻找一种创新的解决方案，使昆斯盖特纳米定位平台能够继续满足半导体、硬盘测试和原子力显微镜日益增长的需求，预计这些需求通常需要低皮米精度。拟议的项目将开发和测试用于轴上平台校准的高阶自动线性补偿。将开发一种新的算法，该算法可以应用于现有的级，并结合适当的校准方法。为了保持生产效率，必须将使用这些方法进行测试和测量的额外开销降至最低。预计这将使我们能够生产行业中最高线性度的精密工作台，同时保持高成品率，减少返工并保持制造成本。

Prior Scientific are looking for an innovative solution which allows Queensgate nanopositioning stages to continue to meet the increasing demands for semiconductor, hard disc testing and atomic force microscopy which are anticipated to routinely require low-picometre accuracies.The project proposed will develop and test higher-order automatic linearity compensation for on-axis stage calibration. A new algorithm will be developed which can be applied to existing stages, together with appropriate calibration methods. To maintain production efficiency, there must be minimum additional overhead for test and measurement with these methods. It is anticipated that this will allow us to produce precision stages with the highest linearity in the industry whilst maintaining high yields, reducing re-work and maintaining manufacturing costs.