Advanced capabilities for surface engineering and nanolithography

表面工程和纳米光刻的先进能力：该项目将建立一个原子层沉积和纳米光刻的设施。强大的制造和工程能力是保持跨学科研究高度竞争力的关键。这些尖端表面纳米工程技术的应用非常广泛，包括：开发具有新特性的新材料，用于传感、生物传感、光学、光子、电子和医疗设备、新超材料、太阳能电池、能源生产和环境保护。

Advanced capabilities for surface engineering and nanolithography: This project will establish a facility for atomic layer deposition and nanolithography. Strong fabrication and engineering capabilities are key in keeping interdisciplinary research highly competitive. The applications of these cutting-edge surface nanoengineering technologies are enormous and include: development of new materials with new properties for sensing, biosensing, optical, photonic, electronic and medical devices, new metamaterials, solar cell, energy production and environmental protection.