Low-cost massively-parallel assembly process for MEMS components

加速度计、陀螺仪和麦克风只是微机电系统（MEMS）的一些日常应用，现在MEMS是消费电子设备中无处不在的组件。随着智能手机和平板电脑的制造商努力进一步缩小他们的设备，这些设备中组件之间浪费的空间在物理尺寸和成本方面变得更加抑制。将MEMS部件和主机芯片的制造过程分开可以实现大量的空间和成本节约，但前提是随后设计的将两者联合收割机结合的过程是低成本和高产量的。Nu Nano正在开发一种能够同时处理400个MEMS组件的工艺，并将制造成本降低90%。Nu Nano将通过制造原子力显微镜（AFM）探针来证明这一点。这些探针由硅制成，由悬臂和尖端组成，非常类似于唱片播放器悬臂和唱针，但其余的硅区域仅用于处理。通过分离探针的复杂功能部分和大块芯片材料的制造，将实现这一巨大的成本节约

Accelerometers, gyroscopes and microphones are just some of the everyday applications ofmicroelectromechanical systems (MEMS) that are now ubiquitous components in consumerelectronic devices. As manufacturers of smart phones and tablets endeavour to shrink theirdevices ever further, so the wasted space between components in these devices becomes evermore inhibiting, both in terms of physical size and cost. Separating the manufacturingprocesses of the MEMS component and the host chip can enable massive space and costsavings to be realised, but only if the process designed to subsequently combine the two islow-cost and high-throughput. Nu Nano is developing a process of this nature which iscapable of addressing 400 MEMS components simultaneously and targeting a 90% reductionin manufacturing costs.Nu Nano will demonstrate this by manufacturing probes for atomic force microscopy (AFM).These probes, made from silicon, consist of a cantilever and tip, much akin to a record playercantilever and stylus, but the rest of the silicon area is only used for handling. By separatingthe fabrication of the complex functional part of the probe and the bulk chip material, thismassive cost saving will be realised