Flexible Optical Lithography for the SuperFab Facility

SuperFab是位于伦敦大学皇家霍洛威分校的超导电子器件纳米制造设施。它致力于超导量子器件的制造，并参与开发超导量子计算机的竞赛。皇家霍洛威是英国第一个制造和操作超导量子比特设备的机构。SuperFab于2019年4月开业，投资约1000万英镑，用于世界一流的电子束光刻、氦离子显微镜和氖离子聚焦离子束工具，并配有各种先进的沉积、蚀刻和表征工具，所有这些工具都致力于生产复杂的超导量子器件。新工具是一种先进的直写光学光刻工具，将集成到我们目前的纳米制造工艺中，它将巩固和增强我们的超导量子器件开发，加速器件生产，提高器件质量并支持晶圆级器件生产。新工具将提供给SuperFab的所有用户，并将通过更快、更可靠的设备开发和原型设计，在工厂内产生重大影响。

SuperFab is a superconducting electronic device nanofabrication facility based at Royal Holloway, University of London. It is dedicated to the fabrication of superconducting quantum devices and participates in the race to develop a superconducting quantum computer. Royal Holloway was the first institution in the UK to fabricate and operate superconducting qubit devices.SuperFab opened in April 2019 following around £10M of investment in world-class electron-beam-lithography, He-ion microscopy and Ne-ion focussed ion beam tools, supported by a wide range of advanced deposition, etching and characterisation tools, all dedicated to the production of sophisticated superconducting quantum devices. The new tool, an advanced direct-write optical lithography tool, will be integrated into our current nanofabrication processes, it will underpin and enhance our superconducting quantum device development, accelerate device production, enhance device quality and support wafer scale device production. The new tool will be available to all users of SuperFab and will provide significant impact within the facility through faster anymore reliable device development and prototyping.