EPSRC Capital Award for Core Equipment: University of Oxford

这次竞标是为了使牛津大学目前在化学、工程科学、材料和物理等部门的微纳米级制造工程方面的能力和能力大大现代化和升级。我们的目标是将下一代纳米/微制造工具与最先进的制造工艺相结合，以实现物理科学领域广泛领域的一系列尖端技术和重大科学突破。近年来，牛津大学已成为开发新型先进纳米制造方法（如光子计算、显示器、校正像差的3D直接激光书写和增材纳米制造）的领导者；我们希望利用这一点，对我们的基础微/纳米制造设施进行以下投资：结合原子层沉积和物理气相沉积系统等离子体增强化学气相沉积掩膜校准器数字3D成像显微镜新仪器将位于一个集中的洁净室，该洁净室容纳各种现有的微、纳米和光制造基础设施，从而利用以前的EPSRC和大学投资。

This bid is to significantly modernize and upgrade Oxford's current capability and capacity in manufacturing engineering at the micro- and nano-scale across our departments of Chemistry, Engineering Science, Materials, and Physics. Our goal is to combine next-generation, nano/micro-manufacturing tools with state-of-the-art fabrication processes in order to realise a range of cutting-edge technologies and major scientific breakthroughs across a broad gamut of fields in the physical sciences. In recent years, Oxford has become a leader in the development of new and advanced nano-manufacturing methodologies (such as photonic computing, displays, aberration-corrected 3D direct laser writing and additive nano-manufacturing); we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:Combined Atomic Layer Deposition and Physical Vapour Deposition System Plasma-enhanced chemical vapour deposition Mask alignerDigital 3D imaging microscopeThe new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure, thereby leveraging previous EPSRC and University investments.