Ino-Flex: Enabling ultra-large area ultra-parallel roll-to-roll transfer printing of high performance flexible inorganic semiconductor devices

该项目寻求开发一种新的大批量制造工艺，使高性能半导体设备能够集成到各种灵活的产品中。这种方法是基于转移印刷，即从原始晶片上移除超薄半导体器件，并精确地转移到大规模柔性基板上。为了显著降低制造产品的成本，这一新工艺允许集成到大规模卷到卷印刷工艺中。将在新的印刷系统内实施一系列战略，包括热控制和动力控制机制。这将允许选择性地控制器件和辊之间的附着力，使大量半导体器件能够由辊平行地从其衬底上取出并印刷到连续移动的柔性轧制衬底上。这一工艺有可能与成熟的印刷工艺相结合，使高性能无机半导体设备与包括有机半导体和织物在内的其他材料集成在一起。高性能无机半导体材料的使用通常由于其脆性的晶片基板而机械上不灵活，这为一系列新的和新兴的智能技术打开了大门，包括高性能显示器(包括大尺寸和小尺寸VR/AR)、可穿戴设备、智能服装和低成本健康监测等生物技术。随着卷对卷转印系统原型的开发，一系列设备将被集成到包括光学和电子部件在内的灵活的大面积基板中。这些将被用来展示这种制造技术在各种新产品和新兴产品中的变革潜力。

This project seeks to develop a new high volume manufacturing process that will enable high performance semiconductor devices to be integrated into a wide range of flexible products. This approach is based on transfer printing where ultra-thin semiconductor devices are removed from the original wafer and precisely transferred onto large scale flexible substrates. In order to significantly reduce the cost of fabricated products, this novel process allows for integration in to large scale roll-to-roll printing processes. A range of strategies including thermal and kinetic control mechanisms will be implemented within the new print system. This will allow for selective control of adhesion between the devices and the roller, enabling large numbers of semiconductor devices to be picked from their substrates in parallel by a roller and printed onto a continuously moving flexible rolled substrate. This process has the potential to be combined with well-established printing processes to allow high performance inorganic semiconductor devices to be integrated with other materials including organic semiconductors and fabrics. The use of high performance inorganic semiconductor materials that are usually mechanically inflexible due to their brittle wafer substrates, opens the door to a wide range of new and emerging smart technologies including high performance displays (both large scale and small scale for VR/AR), wearables, smart clothing and bio-technologies such as low cost health monitoring. Following the development of a prototype roll-to-roll transfer printing system, a range of devices will be integrated into flexible, large area substrates including optical and electronic components. These will be used to demonstrate the transformative potential of this manufacturing technique in a variety of new and emerging products.