Autonomous manufacturing of scalable two-dimensional semiconductor devices (AUTO2D)

原子薄的2D材料提供了一系列基本的半导体器件构建块，具有体相对应的材料所不具备的独特的电子、光学和磁性。值得注意的是，原子片可以不受限制地堆叠在一起，形成具有前所未有的性质和能力的半导体异质结构。这种堆叠的例子包括：以相对扭曲的方式堆叠两层，以形成被称为莫尔异质结构的新型量子材料，这种材料可以表现出超导或奇异的磁性状态，与用于量子技术的光子集成芯片兼容的单光子源，或者世界上最薄的发光二极管和磁性存储器。通常，2D异质结构是通过在繁琐和低成品率的过程中手动堆叠每一层来形成的。用于分离、识别和堆叠2D板材的更快、更精确和可重复的方法对于未来的研究和技术是必不可少的。我们将通过开发自动化制造演示器来满足这些需求，该演示器能够制造对研究突破至关重要的增加复杂性(增加层数和自由度)的2D设备，同时满足对工业应用至关重要的成品率和可扩展性挑战。

Atomically thin 2D materials provide a wide range of basic semiconductor device building blocks with unique electronic, optical, and magnetic properties which do not exist in their bulk counterparts. Remarkably, the atomic sheets can be stacked together without restriction to form semiconductor heterostructures with unprecedented properties and capabilities. Examples of such stacking include: stacking two layers with a relative twist to form novel quantum materials called moiré heterostructures that can exhibit superconductivity or exotic states of magnetism, single photon sources compatible with photonic integrated chips for quantum technologies or the world's thinnest light-emitting diodes and magnetic memories. Typically, 2D heterostructures are formed by manually stacking each layer in a tedious and low-yield process. Much faster yet precise and reproducible methods for isolating, identifying, and stacking of 2D sheets are essential for future research and technologies. We will tackle these needs by developing an automated manufacturing demonstrator capable of fabricating 2D devices of added complexity (increased number of layers and degrees of freedom) essential for research breakthroughs while simultaneously meeting the yield and scalability challenges essential for industrial uptake.