Design and construction of a large-area hot filament reactor suitable for deposition of diamond films directly onto GaN substrates

该博士学位与项目资助(Pi Martin Kuball，物理学)相一致，旨在开发用于下一代功率器件的GaN上金刚石技术。该项目由布里斯托尔大学EPSRC DTA配额资助，作为他们支持整体项目资助的承诺的一部分。学生将与PDRA(其职责是开发新技术，将钻石直接生长在GaN衬底上)一起工作，并开发方法和程序，将这项技术从大约1平方厘米大小的衬底扩大到6英寸直径的半导体行业中常见的晶片。学生的主要目标是修改现有的沉积反应器，使其能够容纳6英寸的晶片，并重新设计灯丝和电源系统，使金刚石薄膜均匀地沉积在这些晶片上。该项目的一些内容还将涉及扩大播种过程，目前使用的是自制的电喷雾设备。这也将针对更大面积的基板进行修改。学生将在一系列新的衬底和材料上进行一些初步的播种和沉积实验，以全面了解操作参数。学生将接受各种表征设备的培训，如扫描电子显微镜、拉曼、四点探头以及真空工程。

This PhD is aligned with the Program grant (PI Martin Kuball, Physics) with the aim of developing diamond-on-GaN technology for next generation power devices. It is funded by the University of Bristol's EPSRC DTA quota as part of their commitment to support the overall Programme grant.The student will work alongside a PDRA (whose remit is to develop new technologies to grow diamond directly on to GaN substrates), and develop methods and procedures to scale up this technology from substrates that are ~1sq.cm in size to 6"-diameter wafers common in the semiconductor industry. The student's main goal will be to modify an existing deposition reactor such that it can accept 6"-wafers, and to redesign the filament and power system such that diamond films will be deposited uniformly across these wafers.Some of the project will also involve scaling up of the seeding process, which currently uses a home-built electrospray apparatus. This will also be modified for larger-area substrates. Some preliminary seeding a deposition experiments will be undertaken on a range of novel substrates and materials, such as black Si needles, to fully understand the operating parameters.The student will be trained on various characterisation facilities, such as SEM, Raman, 4-point probe, as well as vacuum engineering.